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U-Net convolutional neural network-based modification method for precise fabrication of three-dimensional microstructures using laser direct writing lithography

文献类型：期刊论文

作者Sun, Xiuhui1,2; Yin, Shaoyun1; Jiang, Haibo1; Zhang, Weiguo1; Gao, Mingyou1; Du, Jinglei2; Du, Chunlei2,3
刊名OPTICS EXPRESS
出版日期2021-02-15
卷号29期号:4页码:6236-6247
ISSN号1094-4087
DOI10.1364/OE.416871
通讯作者Yin, Shaoyun(ysy@cigit.ac.cn) ; Du, Chunlei(cldu@yznu.edu.cn)
英文摘要In this paper, a modification method based on a U-Net convolutional neural network is proposed for the precise fabrication of three-dimensional microstructures using laser direct writing lithography (LDWL). In order to build the correspondence between the exposure intensity distribution data imported to the laser direct writing system and the surface profile data of the actual fabricated microstructure, these two kinds of data are used as training tensors of the U-Net convolutional neural network, which is proved to be capable of generating their accurate mapping relations. By employing such mapping relations to modify the initial designed exposure intensity data of the parabolic and saddle concave micro-lens with an aperture of 24 mu mx24 mu m, it is demonstrated that their fabrication precision, characterized by the mean squared error (MSE) and the peak signal-to-noise ratio (PSNR) between the fabricated and the designed microstructure, can be improved significantly. Specifically, the MSE of the parabolic and saddle concave micro-lens decreased from 100 to 17 and 151 to 50, respectively, and the PSNR increased from 22dB to 29dB and 20dB to 25dB, respectively. Furthermore, the effect of laser beam shaping using these two kinds of micro-lens has also been improved considerably. This study provides a new solution for the fabrication of high-precision three-dimensional microstructures by LDWL. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
资助项目National Key Research and Development Program of China[2017YFB1002902] ; Chongqing Science and Technology Commission[cstc2019jscx-mbdxX0019] ; National Natural Science Foundation of China[61475199]
WOS研究方向Optics
语种英语
WOS记录号WOS:000619209800127
出版者OPTICAL SOC AMER
源URL[http://119.78.100.138/handle/2HOD01W0/13032]  
专题中国科学院重庆绿色智能技术研究院
通讯作者Yin, Shaoyun; Du, Chunlei
作者单位1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, 266 Fangzheng Ave, Chongqing 400714, Peoples R China
2.Sichuan Univ, Phys Dept, 29 Wangjiang Rd, Chengdu 610064, Sichuan, Peoples R China
3.Yangtze Normal Univ, Sch Elect Informat Engn, Chongqing 408400, Peoples R China
推荐引用方式
GB/T 7714		 Sun, Xiuhui,Yin, Shaoyun,Jiang, Haibo,et al. U-Net convolutional neural network-based modification method for precise fabrication of three-dimensional microstructures using laser direct writing lithography[J]. OPTICS EXPRESS,2021,29(4):6236-6247.
APA Sun, Xiuhui.,Yin, Shaoyun.,Jiang, Haibo.,Zhang, Weiguo.,Gao, Mingyou.,...&Du, Chunlei.(2021).U-Net convolutional neural network-based modification method for precise fabrication of three-dimensional microstructures using laser direct writing lithography.OPTICS EXPRESS,29(4),6236-6247.
MLA Sun, Xiuhui,et al."U-Net convolutional neural network-based modification method for precise fabrication of three-dimensional microstructures using laser direct writing lithography".OPTICS EXPRESS 29.4(2021):6236-6247.

入库方式： OAI收割

来源：重庆绿色智能技术研究院

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