中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Low terahertz-band scanning near-field microscope with 155-nm resolution

文献类型:期刊论文

作者Dai, Guangbin1,2,3; Wang, Jie1; Zhang, Xiaoxuan1; Chang, Tianying1; Cui, Hong-Liang1,3
刊名ULTRAMICROSCOPY
出版日期2021-07-01
卷号226页码:7
关键词Low terahertz-band Near-field Background scattering Antenna theory Mixer demodulation
ISSN号0304-3991
DOI10.1016/j.ultramic.2021.113295
通讯作者Dai, Guangbin(daiguang@ustc.edu.cn) ; Chang, Tianying(tchang@jlu.edu.cn)
英文摘要We report on the design and implementation of a scattering-type scanning near-field microscope working in the low terahertz-band under ambient conditions for nanoscopic investigations of physical properties and characteristics at sample surfaces and interfaces in the microwave and millimeter wave bands. Employing a nano-tip that oscillates vertically at a frequency Omega as the antenna, and a subharmonic mixer as the receiver, and corresponding demodulation algorithms, the back-scattered light carrying tip-sample interaction information is effectively extracted, while excluding almost all of the background noises. The amplitude and phase images constructed from signals demodulated at various harmonics (n Omega, n = 1 - 4) are obtained while scanning an Au-Si step structure with the newly developed microscope, and a resolution of 155 nm (similar to lambda/20,000) has been demonstrated at the fourth harmonic frequency (4 Omega) working at 110 GHz, with signal-to-noise ratio (SNR) equal to 44.4 dB on the Au surface and 36.2 dB on the Si surface, demonstrating the power of this new instrument for micro/nano-resolution studies in the millimeter wave band.
资助项目National Natural Science Foundation of China[61875196] ; National Key Research and Development Program of China[2017YFF0106303]
WOS研究方向Microscopy
语种英语
WOS记录号WOS:000661167900002
出版者ELSEVIER
源URL[http://119.78.100.138/handle/2HOD01W0/13697]  
专题中国科学院重庆绿色智能技术研究院
通讯作者Dai, Guangbin; Chang, Tianying
作者单位1.Jilin Univ, Coll Instrumentat & Elect Engn, Changchun 130061, Jilin, Peoples R China
2.Univ Sci & Technol China, Hefei Natl Lab Phys Sci Microscale, Hefei 230026, Anhui, Peoples R China
3.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China
推荐引用方式
GB/T 7714
Dai, Guangbin,Wang, Jie,Zhang, Xiaoxuan,et al. Low terahertz-band scanning near-field microscope with 155-nm resolution[J]. ULTRAMICROSCOPY,2021,226:7.
APA Dai, Guangbin,Wang, Jie,Zhang, Xiaoxuan,Chang, Tianying,&Cui, Hong-Liang.(2021).Low terahertz-band scanning near-field microscope with 155-nm resolution.ULTRAMICROSCOPY,226,7.
MLA Dai, Guangbin,et al."Low terahertz-band scanning near-field microscope with 155-nm resolution".ULTRAMICROSCOPY 226(2021):7.

入库方式: OAI收割

来源:重庆绿色智能技术研究院

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。