Developing Industry-Level Terahertz Imaging Resolution Using Mathematical Model
文献类型：期刊论文
| 作者 | Mao, Qi1,6; Liu, Jingbo5; Zhu, Yunlong4; Lv, Cixing5; Lu, Yao5; Wei, Dongshan5; Yan, Shihan3 ; Ding, Shujiang2; Ling, Dongxiong5
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| 刊名 | IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY
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| 出版日期 | 2021-09-01 |
| 卷号 | 11期号:5页码:583-590 |
| 关键词 | Imaging Diffraction Mathematical model Time-domain analysis Image resolution Image reconstruction Absorption Absorption variate Fraunhofer diffraction Gaussian distribution integrated circuit terahertz |
| ISSN号 | 2156-342X |
| DOI | 10.1109/TTHZ.2021.3086688 |
| 通讯作者 | Liu, Jingbo(liujb@dgut.edu.cn) ; Zhu, Yunlong(zyl@fudan.edu.cn) |
| 英文摘要 | High-quality terahertz (THz) images are vital for the application of THz imaging in integrated circuit (IC) manufacturing. In far-field imaging, the primary reason for the blurring of the reconstructed THz images is the attenuation of the high-frequency components and Fraunhofer diffraction. This attenuation is almost due to the properties of the THz Gaussian beam and frequency absorption in the medium. The Fraunhofer diffraction is the primary reason why the images undergo blurring in any frequency regime. We propose a mathematical model to develop the resolution of THz images. The proposed model is based on the THz absorption variate. The Gaussian distribution of the THz beam is considered by including the numerical aperture of the THz time-domain spectroscopy system, spot radius at the THz beam waist, beam wavelength, and distance of the waist from the target into the model. Thus, the proposed model is useful for restructuring the THz images and developing the resolution of THz images in industrial applications. |
| 资助项目 | National Key Research and Development Program of China[2018YFB1702701] ; National Key Research and Development Program of China[2018YFB1004004] ; National Natural Science Foundation of China (NSFC)[61771138] ; Science and Technology Innovation Institute of Dongguan University of Technology[KCYCXPT2017004] ; China Postdoctoral Science Foundation[2018M643651] ; China Postdoctoral Science Foundation[2019622102012] |
| WOS研究方向 | Engineering ; Optics ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000692209400015 |
| 出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/14233]  |
| 专题 | 中国科学院重庆绿色智能技术研究院 |
| 通讯作者 | Liu, Jingbo; Zhu, Yunlong |
| 作者单位 | 1.Dongbei Univ Finance & Econ, Dalian 116025, Peoples R China 2.Xi An Jiao Tong Univ, Sch Sci, State Key Lab Elect Insulat & Power Equipment, Xian 710049, Peoples R China 3.Chinese Acad Sci, Chongqing Engn Res Ctr High Resolut & Three Dimen, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China 4.Fudan Univ, Acad Engn & Technol, Shanghai 200433, Peoples R China 5.Dongguan Univ Technol, Sch Elect Engn & Intelligentizat, Dongguan 523808, Peoples R China 6.Sch Management Sci & Engn, Dalian 116025, Peoples R China |
| 推荐引用方式 GB/T 7714 | Mao, Qi,Liu, Jingbo,Zhu, Yunlong,et al. Developing Industry-Level Terahertz Imaging Resolution Using Mathematical Model[J]. IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY,2021,11(5):583-590. |
| APA | Mao, Qi.,Liu, Jingbo.,Zhu, Yunlong.,Lv, Cixing.,Lu, Yao.,...&Ling, Dongxiong.(2021).Developing Industry-Level Terahertz Imaging Resolution Using Mathematical Model.IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY,11(5),583-590. |
| MLA | Mao, Qi,et al."Developing Industry-Level Terahertz Imaging Resolution Using Mathematical Model".IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY 11.5(2021):583-590. |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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