Microstructure characterization of Al2O3-Mullite-AlN multiphase ceramic film on Cr/WCu substrate
文献类型：期刊论文
| 作者 | Jiandong Zhu ; Zhen Zheng; Chunqing Wang; Jianguo Liu |
| 刊名 | JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
 |
| 出版日期 | 2020 |
| 卷号 | 31期号:8页码:5941-5947 |
| 公开日期 | 2020 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30661]  |
| 专题 | 半导体研究所_光电子研究发展中心 |
| 推荐引用方式 GB/T 7714 | Jiandong Zhu ;Zhen Zheng;Chunqing Wang;Jianguo Liu. Microstructure characterization of Al2O3-Mullite-AlN multiphase ceramic film on Cr/WCu substrate[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2020,31(8):5941-5947. |
| APA | Jiandong Zhu ;Zhen Zheng;Chunqing Wang;Jianguo Liu.(2020).Microstructure characterization of Al2O3-Mullite-AlN multiphase ceramic film on Cr/WCu substrate.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,31(8),5941-5947. |
| MLA | Jiandong Zhu ;Zhen Zheng;Chunqing Wang;Jianguo Liu."Microstructure characterization of Al2O3-Mullite-AlN multiphase ceramic film on Cr/WCu substrate".JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS 31.8(2020):5941-5947. |
入库方式： OAI收割
来源：半导体研究所
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