The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter
文献类型：期刊论文
| 作者 | Li He ; Yaogong Wang; Xiaowu He ; Jie Li; Qi He; Dawei Wei |
| 刊名 | VACUUM
 |
| 出版日期 | 2020 |
| 卷号 | 171页码:108998 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30701]  |
| 专题 | 半导体研究所_半导体超晶格国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Li He ;Yaogong Wang; Xiaowu He ; Jie Li;Qi He; Dawei Wei. The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter[J]. VACUUM,2020,171:108998. |
| APA | Li He ;Yaogong Wang; Xiaowu He ; Jie Li;Qi He; Dawei Wei.(2020).The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter.VACUUM,171,108998. |
| MLA | Li He ;Yaogong Wang; Xiaowu He ; Jie Li;Qi He; Dawei Wei."The combined effects of anodization parameters on morphological of the porous silicon and the ballistic electron emission of PS-based emitter".VACUUM 171(2020):108998. |
入库方式： OAI收割
来源：半导体研究所
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