中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Comparison of Cavities Formed in Single Crystalline and Polycrystalline alpha-SiC after H Implantation

文献类型:期刊论文

作者Liao, Qing2; Kang, Long3; Zhang, Tong-Min3; Liu, Hui-Ping3; Wang, Tao4; Li, Xiao-Gang3; Li, Jin-Yu3; Yang, Zhen1; Li, Bing-Sheng2
刊名CHINESE PHYSICS LETTERS
出版日期2020-06-01
卷号37期号:7页码:5
关键词61 80 Jh 61 82 Fk 68 37 Lp 81 40 Wx
ISSN号0256-307X
DOI10.1088/0256-307X/37/7/076102
通讯作者Li, Bing-Sheng(libingshengmvp@163.com)
英文摘要Cavities and extended defects formed in single crystalline and polycrystalline alpha-SiC implanted with H(+)ions are compared. The samples are investigated by cross-sectional transmission electron microscopy. H(2)bubbles are formed during H implantation and H(2)molecules escape the sample to form cavities during thermal annealing at 1100 degrees C. Microcracks and the extended defects prefer to nucleate in single crystalline alpha-SiC, but not polycrystalline alpha-SiC. Grain boundaries can account for the experimental results. The formation of cavities on grain boundaries is investigated.
WOS关键词EXFOLIATION ; DAMAGE
资助项目National Natural Science Foundation of China[U1832133] ; National Natural Science Foundation of China[11905206]
WOS研究方向Physics
语种英语
WOS记录号WOS:000553033200001
出版者IOP PUBLISHING LTD
资助机构National Natural Science Foundation of China
源URL[http://119.78.100.186/handle/113462/140206]  
专题中国科学院近代物理研究所
通讯作者Li, Bing-Sheng
作者单位1.Sun Yat Sen Univ, Sino French Inst Nucl Engn & Technol, Zhuhai 519082, Peoples R China
2.Southwest Univ Sci & Technol, State Key Lab Environm Friendly Energy Mat, Mianyang 621010, Sichuan, Peoples R China
3.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China
4.China Acad Engn Phys, Inst Fluid Phys, Mianyang 621900, Sichuan, Peoples R China
推荐引用方式
GB/T 7714
Liao, Qing,Kang, Long,Zhang, Tong-Min,et al. Comparison of Cavities Formed in Single Crystalline and Polycrystalline alpha-SiC after H Implantation[J]. CHINESE PHYSICS LETTERS,2020,37(7):5.
APA Liao, Qing.,Kang, Long.,Zhang, Tong-Min.,Liu, Hui-Ping.,Wang, Tao.,...&Li, Bing-Sheng.(2020).Comparison of Cavities Formed in Single Crystalline and Polycrystalline alpha-SiC after H Implantation.CHINESE PHYSICS LETTERS,37(7),5.
MLA Liao, Qing,et al."Comparison of Cavities Formed in Single Crystalline and Polycrystalline alpha-SiC after H Implantation".CHINESE PHYSICS LETTERS 37.7(2020):5.

入库方式: OAI收割

来源:近代物理研究所

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