In-situ revealing the degradation mechanisms of Pt film over 1000 degrees C
文献类型：期刊论文
| 作者 | Ma, Dongfeng; Mao, Shengcheng; Teng, Jiao; Wang, Xinliang; Li, Xiaochen; Ning, Jin; Li, Zhipeng; Zhang, Qing; Tian, Zhiyong; Wang, Menglong; Zhang, Ze; Han, Xiaodong |
| 刊名 | JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
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| 出版日期 | 2021 |
| 卷号 | 95页码:10-19 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30720]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Ma, Dongfeng; Mao, Shengcheng; Teng, Jiao; Wang, Xinliang; Li, Xiaochen; Ning, Jin; Li, Zhipeng; Zhang, Qing; Tian, Zhiyong; Wang, Menglong; Zhang, Ze; Han, Xiaodong. In-situ revealing the degradation mechanisms of Pt film over 1000 degrees C[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2021,95:10-19. |
| APA | Ma, Dongfeng; Mao, Shengcheng; Teng, Jiao; Wang, Xinliang; Li, Xiaochen; Ning, Jin; Li, Zhipeng; Zhang, Qing; Tian, Zhiyong; Wang, Menglong; Zhang, Ze; Han, Xiaodong.(2021).In-situ revealing the degradation mechanisms of Pt film over 1000 degrees C.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,95,10-19. |
| MLA | Ma, Dongfeng; Mao, Shengcheng; Teng, Jiao; Wang, Xinliang; Li, Xiaochen; Ning, Jin; Li, Zhipeng; Zhang, Qing; Tian, Zhiyong; Wang, Menglong; Zhang, Ze; Han, Xiaodong."In-situ revealing the degradation mechanisms of Pt film over 1000 degrees C".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 95(2021):10-19. |
入库方式： OAI收割
来源：半导体研究所
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