Stabilization of thick, rhombohedral Hf0.5Zr0.5O2 epilayer on c-plane ZnO
文献类型：期刊论文
| 作者 | Zheng, Maoyuan; Yin, Zhigang; Cheng, Yong; Zhang, Xingwang; Wu, Jinliang; Qi, Jing |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2021 |
| 卷号 | 119期号:17页码:172904 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30857]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Zheng, Maoyuan; Yin, Zhigang; Cheng, Yong; Zhang, Xingwang; Wu, Jinliang; Qi, Jing. Stabilization of thick, rhombohedral Hf0.5Zr0.5O2 epilayer on c-plane ZnO[J]. APPLIED PHYSICS LETTERS,2021,119(17):172904. |
| APA | Zheng, Maoyuan; Yin, Zhigang; Cheng, Yong; Zhang, Xingwang; Wu, Jinliang; Qi, Jing.(2021).Stabilization of thick, rhombohedral Hf0.5Zr0.5O2 epilayer on c-plane ZnO.APPLIED PHYSICS LETTERS,119(17),172904. |
| MLA | Zheng, Maoyuan; Yin, Zhigang; Cheng, Yong; Zhang, Xingwang; Wu, Jinliang; Qi, Jing."Stabilization of thick, rhombohedral Hf0.5Zr0.5O2 epilayer on c-plane ZnO".APPLIED PHYSICS LETTERS 119.17(2021):172904. |
入库方式： OAI收割
来源：半导体研究所
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