中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Stabilization of thick, rhombohedral Hf0.5Zr0.5O2 epilayer on c-plane ZnO

文献类型:期刊论文

AuthorZheng, Maoyuan;   Yin, Zhigang;   Cheng, Yong;   Zhang, Xingwang;   Wu, Jinliang;   Qi, Jing
SourceAPPLIED PHYSICS LETTERS
Issued Date2021
Volume119Issue:17Pages:172904
Available Date2021
源URL[http://ir.semi.ac.cn/handle/172111/30857]  
Collection半导体研究所_中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
Zheng, Maoyuan; Yin, Zhigang; Cheng, Yong; Zhang, Xingwang; Wu, Jinliang; Qi, Jing. Stabilization of thick, rhombohedral Hf0.5Zr0.5O2 epilayer on c-plane ZnO[J]. APPLIED PHYSICS LETTERS,2021,119(17):172904.
APA Zheng, Maoyuan; Yin, Zhigang; Cheng, Yong; Zhang, Xingwang; Wu, Jinliang; Qi, Jing.(2021).Stabilization of thick, rhombohedral Hf0.5Zr0.5O2 epilayer on c-plane ZnO.APPLIED PHYSICS LETTERS,119(17),172904.
MLA Zheng, Maoyuan; Yin, Zhigang; Cheng, Yong; Zhang, Xingwang; Wu, Jinliang; Qi, Jing."Stabilization of thick, rhombohedral Hf0.5Zr0.5O2 epilayer on c-plane ZnO".APPLIED PHYSICS LETTERS 119.17(2021):172904.

入库方式: OAI收割

来源:半导体研究所

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