Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy
文献类型：期刊论文
| 作者 | Zhang, Wenjin1,2; Wei, Xinyu1,2; Chen, Longwei3; Lin, Qifu3; Jiang, Yiman3 ; Liu, Chengzhou1,3; Shan, Jiafang1
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| 刊名 | PLASMA SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2022-02-01 |
| 卷号 | 24 |
| ISSN号 | 1009-0630 |
| 关键词 | surface wave plasma low temperature plasma optical emission diagnosis |
| DOI | 10.1088/2058-6272/ac446d |
| 通讯作者 | Chen, Longwei(lwchen@ipp.ac.cn) |
| 英文摘要 | The coaxial surface wave linear plasma with preeminent axial uniformity is developed with the 2.45 GHz microwave generator. By optical emission spectroscopy, parameters of the argon linear plasma with a length over 600 mm are diagnosed under gas pressure of 30 and 50 Pa and different microwave powers. The spectral lines of argon and H (beta) (486.1 nm) atoms in excited state are observed for estimating electron excitation temperature and electron density. Spectrum bands in 305-310 nm of diatomic OH (A(2)Sigma(+)-X-2 Pi(i)) radicals are used to determine the molecule rotational temperature. Finally, the axial uniformity of electron density and electron excitation temperature are analyzed emphatically under various conditions. The results prove the distinct optimization of compensation from dual powers input, which can narrow the uniform coefficient of electron density and electron excitation temperature by around 40% and 22% respectively. With the microwave power increasing, the axial uniformity of both electron density and electron excitation temperature performs better. Nevertheless, the fluctuation of electron density along the axial direction appeared with higher gas pressure. The axial uniformity of coaxial surface wave linear plasma could be controlled by pressure and power for a better utilization in material processing. |
| WOS关键词 | LARGE-AREA ; STARK PROFILES ; PROPAGATION ; DEPENDENCE ; COLUMNS |
| 资助项目 | National Natural Science Foundation of China[11575252] ; National Natural Science Foundation of China[11775270] ; Institute of Energy of Hefei Comprehensive National Science Center, People's Republic of China[19KZS206] ; Institute of Energy of Hefei Comprehensive National Science Center, People's Republic of China[21KZS201] |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| 出版者 | IOP Publishing Ltd |
| WOS记录号 | WOS:000745323200001 |
| 资助机构 | National Natural Science Foundation of China ; Institute of Energy of Hefei Comprehensive National Science Center, People's Republic of China |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/127327]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Chen, Longwei |
| 作者单位 | 1.Chinese Acad Sci, Inst Plasma Phys, Hefei Inst Phys Sci, Hefei 230031, Peoples R China 2.Univ Sci & Technol China, Hefei 230026, Peoples R China 3.Hefei Comprehens Natl Sci Ctr, Inst Energy, Hefei 230031, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Wenjin,Wei, Xinyu,Chen, Longwei,et al. Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy[J]. PLASMA SCIENCE & TECHNOLOGY,2022,24. |
| APA | Zhang, Wenjin.,Wei, Xinyu.,Chen, Longwei.,Lin, Qifu.,Jiang, Yiman.,...&Shan, Jiafang.(2022).Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy.PLASMA SCIENCE & TECHNOLOGY,24. |
| MLA | Zhang, Wenjin,et al."Axial uniformity diagnosis of coaxial surface wave linear plasma by optical emission spectroscopy".PLASMA SCIENCE & TECHNOLOGY 24(2022). |
入库方式： OAI收割
来源：合肥物质科学研究院
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