Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas
文献类型：期刊论文
| 作者 | Lim, Yegeon1; Severn, Greg2; Yip, Chi-Shung3; Ghim, Y-C1 |
| 刊名 | PLASMA SOURCES SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2022-02-01 |
| 卷号 | 31 |
| 关键词 | planar Langmuir probe ion sheaths ion collecting area power law dependence |
| ISSN号 | 0963-0252 |
| DOI | 10.1088/1361-6595/ac4d03 |
| 通讯作者 | Ghim, Y-C(ycghim@kaist.ac.kr) |
| 英文摘要 | For unmagnetized low temperature Ar plasmas with plasma density ranging from 3 x 10(8) to 10(10) cm(-3) and an electron temperature of similar to 1 eV, the expansion of the ion collecting area of a double-sided planar Langmuir probe with respect to probe bias is experimentally investigated, through a systematic scan of plasma parameters. In accordance with many existing numerical studies, the ion collecting area is found to follow a power law for a sufficiently negative probe bias. Within our experimental conditions, the power law coefficient and exponent have been parameterized as a function of the normalized probe radius and compared with numerical results where qualitatively comparable features are identified. However, numerical results underestimate the power law coefficient while the exponent is overestimated. Our experimental measurements also confirm that ion-neutral collisions play a role in determining the expanded ion collecting area, thus changing values of the power law coefficient and exponent. This work suggests that a power law fit to the ion collecting area must be performed solely based on experimentally obtained data rather than using empirical formulae from simulation results since material and cleanness of the probe, type of working gas, and neutral pressure may also affect the expansion of the ion collecting area, factors which are difficult to model in a numerical simulation. A proper scheme of analyzing an I-V characteristic of a Langmuir probe based on a power law fit is also presented. |
| WOS关键词 | ELECTRON-DISTRIBUTION ; SHEATH |
| 资助项目 | National R&D Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT[NRF-2020M1A7A1A03016161] ; National R&D Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT[NRF-2021R1A2C2005654] ; US National Science Foundation[NSF PHY-1804240] ; US National Science Foundation[NSF PHY-2108636] ; National Natural Science Foundation of China[11875285] |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000756998100001 |
| 出版者 | IOP Publishing Ltd |
| 资助机构 | National R&D Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT ; US National Science Foundation ; National Natural Science Foundation of China |
| 源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/127545]  |
| 专题 | 中国科学院合肥物质科学研究院 |
| 通讯作者 | Ghim, Y-C |
| 作者单位 | 1.Korea Adv Inst Sci & Technol, Dept Nucl & Quantum Engn, Daejeon 34141, South Korea 2.Univ San Diego, Dept Phys & Biophys, San Diego, CA 92110 USA 3.Chinese Acad Sci, Inst Plasma Phys, Hefei Inst Phys Sci, Hefei 230031, Peoples R China |
| 推荐引用方式 GB/T 7714 | Lim, Yegeon,Severn, Greg,Yip, Chi-Shung,et al. Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY,2022,31. |
| APA | Lim, Yegeon,Severn, Greg,Yip, Chi-Shung,&Ghim, Y-C.(2022).Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas.PLASMA SOURCES SCIENCE & TECHNOLOGY,31. |
| MLA | Lim, Yegeon,et al."Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas".PLASMA SOURCES SCIENCE & TECHNOLOGY 31(2022). |
入库方式： OAI收割
来源：合肥物质科学研究院
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