均一尺寸CeO2颗粒的合成方法及其在光学抛光中的应用研究
文献类型：学位论文
| 作者 | 王奇 |
| 学位类别 | 博士 |
| 答辩日期 | 2008-06-12 |
| 授予单位 | 中国科学院过程工程研究所 |
| 授予地点 | 过程工程研究所 |
| 导师 | 过程工程研究所 |
| 关键词 | CeO2 粒度 控制合成 化学机械研磨 |
| 其他题名 | study on synthesis method of uniform sized CeO2 particles and their application in optic polishing |
| 学位专业 | 化学工程 |
| 中文摘要 | CeO2磨料应用于化学机械研磨时，急需解决的关键科学问题是如何克服颗粒尺寸不均一，形貌不规则和团聚严重。硬团聚颗粒及尖锐的棱角都会对抛光件造成严重划伤，从而降低成品率。本文主要围绕均一尺寸CeO2颗粒控制合成方法进行研究，发现合成在亚微米、纳米尺度均一尺寸的球形颗粒是提高CeO2磨料有效研磨粒子数、增强抛光精度水平的有效途径。主要的研究工作及结果如下： (1) 在CeO2抛光粉沉淀法生产工艺后期，采用高能湿法球磨与喷雾干燥联用的方法来处理经煅烧和水淬后的粉体，改进工艺实现了产品颗粒的球形化、超细化和尺寸均一化。工业应用结果证实，球磨喷雾工艺提高了产品的抛光精度和质量稳定性。另外，通过喷雾造粒工艺，制备了大粒径的CeO2微球颗粒。 (2) 发展了一种纳微乳液火焰燃烧法来制备CeO2颗粒。完成了燃烧器的设计，确定了燃烧器的条件参数。发现通过控制水核大小能制备出不同颗粒度和晶粒度的CeO2颗粒。采用ELPI对火焰中生成物粒径的动态变化进行在线观测，结合收集物的各项表征研究了该系统中CeO2颗粒形成的过程机制，提出了纳微乳液火焰燃烧法CeO2颗粒的生长模型。 (3) 通过正交实验优化了PVP模板水热法CeO2颗粒制备的反应条件，研究了该体系分子反应机理和结晶成核的动力学因素。在此基础上，探索了一种复合模板晶种诱导水热法来控制合成单分散CeO2微球，其颗粒均一性达到DUKE尺寸标准物质水平。研究了该方法水热反应的过程机制，提出了该系统单分散CeO2微球的生长模型。 (4) 将不同制备方法得到的CeO2颗粒应用到不同硬度级别的光学玻璃抛光过程中，发现提高CeO2研磨粒子的尺寸均一性、球形化和单分散性是达到超光滑表面抛光水平的有效途径。 |
| 英文摘要 | When CeO2 particles as abrasives used in chemical mechanical polishing, the most trouble problem is their size and shape control. Hard agglomerates and cuspid edge angles always bring the work piece surface serious scratchs, and then the rate of finished products is low. This paper is concerned with the research on control synthesis methods of uniform sized CeO2 particles. It was found that CeO2 particles with uniform size and spherical shape can increase the number of effective grinding particles and improve the precision in the process of the optic polishing. The research results are summarized as follows: (1) Milling and spray drying method was developed to treat the powders after calcining and water quenching in the late period of CeO2 abrasives production. And then spherical and ultrafine CeO2 partilces with unform size were prepared through this aftertreatment. According to the results of industry application, it was proved that this kind of CeO2 abrasive improved the polishing precision and quality stability. On the other hand, CeO2 microspheres with large particle size were synthesized through spray granulation method. (2) Nano-emulsion flame combustion method was present to prepare CeO2 particles. The burner was designed and the reaction parameters were determined. It was found that ultrafine CeO2 with different particle and crystal size can be acquired by the control of the water droplet size in the nano-emulsion fuel oil. Through the online observation of the particle size dynamic changes with ELPI and the various characterization of the collected particle in flame, the formation mechanism of the CeO2 particles was researched and the particle growth model was proposed. (3) Reaction conditions of PVP template hydrothermal method were optimized by orthogonal tests. The molecular reaction mechanism and kinetic factors of the crystallization and nucleation behavior were researched. On this basis, a new kind of composite template and crystal seed induce hydrothermal method was invented to realize the controllable preparation of monodisperse CeO2 microspheres. The size distribution level of this monodisperse CeO2 microspheres is equivalent to that of DUKE particle size standards. The process mechanism of the hydrothermal reaction was studied and the microspheres growth model was provided. (4) CeO2 particles of different synthesis methods were applied in polishing process of optic glasses with different hardness. From the results comparision, it can be concluded that uniform size, spherical shape and monodispersability are key properties of CeO2 particles for endowing the optic glass supersmooth surface in the polishing process. |
| 语种 | 中文 |
| 公开日期 | 2013-09-13 |
| 页码 | 140 |
| 源URL | [http://ir.ipe.ac.cn/handle/122111/1187]  |
| 专题 | 过程工程研究所_研究所（批量导入） |
| 推荐引用方式 GB/T 7714 | 王奇. 均一尺寸CeO2颗粒的合成方法及其在光学抛光中的应用研究[D]. 过程工程研究所. 中国科学院过程工程研究所. 2008. |
入库方式： OAI收割
来源：过程工程研究所
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