Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method
文献类型：期刊论文
| 作者 | Chen, Nanhong; Ning, Honglong; Liang, Zhihao; Liu, Xianzhe; Wang, Xiaofeng; Yao, Rihui; Zhong, Jinyao; Fu, Xiao; Qiu, Tian; Peng, Junbiao |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2021 |
| 卷号 | 12期号:12页码:1496 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30737]  |
| 专题 | 半导体研究所_中科院半导体照明研发中心 |
| 推荐引用方式 GB/T 7714 | Chen, Nanhong; Ning, Honglong; Liang, Zhihao; Liu, Xianzhe; Wang, Xiaofeng; Yao, Rihui; Zhong, Jinyao; Fu, Xiao; Qiu, Tian; Peng, Junbiao. Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method[J]. MICROMACHINES,2021,12(12):1496. |
| APA | Chen, Nanhong; Ning, Honglong; Liang, Zhihao; Liu, Xianzhe; Wang, Xiaofeng; Yao, Rihui; Zhong, Jinyao; Fu, Xiao; Qiu, Tian; Peng, Junbiao.(2021).Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method.MICROMACHINES,12(12),1496. |
| MLA | Chen, Nanhong; Ning, Honglong; Liang, Zhihao; Liu, Xianzhe; Wang, Xiaofeng; Yao, Rihui; Zhong, Jinyao; Fu, Xiao; Qiu, Tian; Peng, Junbiao."Application of Laser Treatment in MOS-TFT Active Layer Prepared by Solution Method".MICROMACHINES 12.12(2021):1496. |
入库方式： OAI收割
来源：半导体研究所
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