Thickness effect on the crystallization characteristic of RF sputtered Sb thin films
文献类型：期刊论文
| 作者 | Huang, Yufeng; Wu, Weihua; Xu, Shengqing; Zhu, Xiaoqin; Song, Sannian; Song, Zhitang |
| 刊名 | JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
 |
| 出版日期 | 2021 |
| 卷号 | 32期号:19页码:24240-24247 |
| 语种 | 英语 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30894]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Huang, Yufeng; Wu, Weihua; Xu, Shengqing; Zhu, Xiaoqin; Song, Sannian; Song, Zhitang. Thickness effect on the crystallization characteristic of RF sputtered Sb thin films[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2021,32(19):24240-24247. |
| APA | Huang, Yufeng; Wu, Weihua; Xu, Shengqing; Zhu, Xiaoqin; Song, Sannian; Song, Zhitang.(2021).Thickness effect on the crystallization characteristic of RF sputtered Sb thin films.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,32(19),24240-24247. |
| MLA | Huang, Yufeng; Wu, Weihua; Xu, Shengqing; Zhu, Xiaoqin; Song, Sannian; Song, Zhitang."Thickness effect on the crystallization characteristic of RF sputtered Sb thin films".JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS 32.19(2021):24240-24247. |
入库方式： OAI收割
来源：半导体研究所
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