Study on the asymmetry of nanopore in Al droplet etching
文献类型：期刊论文
| 作者 | Shen, Jiaxin; Lv, Hongliang; Ni, Haiqiao; Liu, Hanqing; Su, Xiangbin; Zhang, Jing; Shang, Xiangjun; Zhuo, Zhiyao; Li, Shulun; Chen, Yao; Sun, Baoquan; Zhang, Yu; Niu, Zhichuan |
| 刊名 | OPTICAL AND QUANTUM ELECTRONICS
 |
| 出版日期 | 2021 |
| 卷号 | 53期号:8页码:412 |
| 语种 | 英语 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30892]  |
| 专题 | 半导体研究所_半导体超晶格国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Shen, Jiaxin; Lv, Hongliang; Ni, Haiqiao; Liu, Hanqing; Su, Xiangbin; Zhang, Jing; Shang, Xiangjun; Zhuo, Zhiyao; Li, Shulun; Chen, Yao; Sun, Baoquan; Zhang, Yu; Niu, Zhichuan. Study on the asymmetry of nanopore in Al droplet etching[J]. OPTICAL AND QUANTUM ELECTRONICS,2021,53(8):412. |
| APA | Shen, Jiaxin; Lv, Hongliang; Ni, Haiqiao; Liu, Hanqing; Su, Xiangbin; Zhang, Jing; Shang, Xiangjun; Zhuo, Zhiyao; Li, Shulun; Chen, Yao; Sun, Baoquan; Zhang, Yu; Niu, Zhichuan.(2021).Study on the asymmetry of nanopore in Al droplet etching.OPTICAL AND QUANTUM ELECTRONICS,53(8),412. |
| MLA | Shen, Jiaxin; Lv, Hongliang; Ni, Haiqiao; Liu, Hanqing; Su, Xiangbin; Zhang, Jing; Shang, Xiangjun; Zhuo, Zhiyao; Li, Shulun; Chen, Yao; Sun, Baoquan; Zhang, Yu; Niu, Zhichuan."Study on the asymmetry of nanopore in Al droplet etching".OPTICAL AND QUANTUM ELECTRONICS 53.8(2021):412. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。