Acetone Sensor Based on FAIMS-MEMS
文献类型：期刊论文
| 作者 | Zhang, Junna1; Lei, Cheng1; Liang, Ting1; Liu, Ruifang2; Zhao, Zhujie1; Qi, Lei3; Ghaffar, Abdul4,5; Xiong, Jijun1 |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2021-12-01 |
| 卷号 | 12期号:12页码:21 |
| 关键词 | diabetes FAIMS-MEMS acetone reproducibility stability |
| DOI | 10.3390/mi12121531 |
| 英文摘要 | In this paper, to address the problems of large blood draws, long testing times, and the inability to achieve dynamic detection of invasive testing for diabetes, stemming from the principle that type 1 diabetic patients exhale significantly higher levels of acetone than normal people, a FAIMS-MEMS gas sensor was designed to detect acetone, which utilizes the characteristics of high sensitivity, fast response, and non-invasive operation. It is prepared by MEMS processes, such as photolithography, etching, and sputtering, its specific dimensions are 4000 mu m in length, 3000 mu m in width and 800 mu m in height and the related test system was built to detect acetone gas. The test results show that when acetone below 0.8 ppm is introduced, the voltage value detected by the sensor basically does not change, while when acetone gas exceeds 1.8 ppm, the voltage value detected by the sensor increases significantly. The detection accuracy of the sensor prepared by this method is about 0.02 ppm/mV, and the voltage change can reach 1 V with a response time of 3 s and a recovery time of 4 s when tested under 20 ppm acetone environment; this has good repeatability and stability, and has great prospects in the field of non-invasive detection of type 1 diabetes. |
| 资助项目 | National Natural Science Foundation of China[51935011] ; Innovative Research Group Project of National Science Foundation of China[51821003] ; Fund for Shanxi 1331 Project Key Subject Construction, Key research and development project of Shanxi Province[201903D121123] ; Central Government Guides Gocal Gcience and Technology Development Fund[YDZX20201400001664] |
| WOS研究方向 | Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
| 语种 | 英语 |
| 出版者 | MDPI |
| WOS记录号 | WOS:000736693200001 |
| 源URL | [http://119.78.100.198/handle/2S6PX9GI/30819]  |
| 专题 | 中科院武汉岩土力学所 |
| 通讯作者 | Lei, Cheng; Liang, Ting |
| 作者单位 | 1.North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China 2.Southeast Univ, State Key Lab Bioelect, Nanjing 210096, Peoples R China 3.North Automat Control Technol Inst, Taiyuan 030006, Peoples R China 4.Chinese Acad Sci, Inst Rock & Soil Mech, State Key Lab Geomech & Geotech Engn, Wuhan 430071, Peoples R China 5.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Junna,Lei, Cheng,Liang, Ting,et al. Acetone Sensor Based on FAIMS-MEMS[J]. MICROMACHINES,2021,12(12):21. |
| APA | Zhang, Junna.,Lei, Cheng.,Liang, Ting.,Liu, Ruifang.,Zhao, Zhujie.,...&Xiong, Jijun.(2021).Acetone Sensor Based on FAIMS-MEMS.MICROMACHINES,12(12),21. |
| MLA | Zhang, Junna,et al."Acetone Sensor Based on FAIMS-MEMS".MICROMACHINES 12.12(2021):21. |
入库方式： OAI收割
来源：武汉岩土力学研究所
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