A Novel Lame Mode RF-MEMS resonator with high quality factor
文献类型：期刊论文
| 作者 | Chen, Zeji; Wang, Tianyun; Jia, Qianqian; Yang, Jinling; Yuan, Quan; Zhu, Yinfang; Yang, Fuhua |
| 刊名 | INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
 |
| 出版日期 | 2021 |
| 卷号 | 204页码:106484 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30985]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Chen, Zeji; Wang, Tianyun; Jia, Qianqian; Yang, Jinling; Yuan, Quan; Zhu, Yinfang; Yang, Fuhua. A Novel Lame Mode RF-MEMS resonator with high quality factor[J]. INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES,2021,204:106484. |
| APA | Chen, Zeji; Wang, Tianyun; Jia, Qianqian; Yang, Jinling; Yuan, Quan; Zhu, Yinfang; Yang, Fuhua.(2021).A Novel Lame Mode RF-MEMS resonator with high quality factor.INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES,204,106484. |
| MLA | Chen, Zeji; Wang, Tianyun; Jia, Qianqian; Yang, Jinling; Yuan, Quan; Zhu, Yinfang; Yang, Fuhua."A Novel Lame Mode RF-MEMS resonator with high quality factor".INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES 204(2021):106484. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。