A facile and non-destructive quartz fiber shadow mask process for the sub-micrometer device fabrication on two-dimensional semiconductors
文献类型：期刊论文
| 作者 | Li, Li-An; Zhao, Fang-Yuan; Zhai, Shen-Qiang; Liu, Feng-Qi; Wei, Zhong-Ming |
| 刊名 | RARE METALS
 |
| 出版日期 | 2021 |
| 卷号 | 41期号:1页码:319-324 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31014]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Li, Li-An; Zhao, Fang-Yuan; Zhai, Shen-Qiang; Liu, Feng-Qi; Wei, Zhong-Ming. A facile and non-destructive quartz fiber shadow mask process for the sub-micrometer device fabrication on two-dimensional semiconductors[J]. RARE METALS,2021,41(1):319-324. |
| APA | Li, Li-An; Zhao, Fang-Yuan; Zhai, Shen-Qiang; Liu, Feng-Qi; Wei, Zhong-Ming.(2021).A facile and non-destructive quartz fiber shadow mask process for the sub-micrometer device fabrication on two-dimensional semiconductors.RARE METALS,41(1),319-324. |
| MLA | Li, Li-An; Zhao, Fang-Yuan; Zhai, Shen-Qiang; Liu, Feng-Qi; Wei, Zhong-Ming."A facile and non-destructive quartz fiber shadow mask process for the sub-micrometer device fabrication on two-dimensional semiconductors".RARE METALS 41.1(2021):319-324. |
入库方式： OAI收割
来源：半导体研究所
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