Temperature and humidity sensor based on MEMS technology
文献类型：期刊论文
| 作者 | Zhao, Dongyan; Wang, Yubo; Shao, Jin; Zhang, Peng; Chen, Yanning; Fu, Zhen; Wang, Shuaipeng; Zhao, Wenlong; Zhou, Zhimei; Yuan, Yuandong; Fu, Dengyuan; Zhu, Yinfang |
| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2021 |
| 卷号 | 11期号:8页码:85126 |
| 语种 | 英语 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31034]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Zhao, Dongyan; Wang, Yubo; Shao, Jin; Zhang, Peng; Chen, Yanning; Fu, Zhen; Wang, Shuaipeng; Zhao, Wenlong; Zhou, Zhimei; Yuan, Yuandong; Fu, Dengyuan; Zhu, Yinfang. Temperature and humidity sensor based on MEMS technology[J]. AIP ADVANCES,2021,11(8):85126. |
| APA | Zhao, Dongyan; Wang, Yubo; Shao, Jin; Zhang, Peng; Chen, Yanning; Fu, Zhen; Wang, Shuaipeng; Zhao, Wenlong; Zhou, Zhimei; Yuan, Yuandong; Fu, Dengyuan; Zhu, Yinfang.(2021).Temperature and humidity sensor based on MEMS technology.AIP ADVANCES,11(8),85126. |
| MLA | Zhao, Dongyan; Wang, Yubo; Shao, Jin; Zhang, Peng; Chen, Yanning; Fu, Zhen; Wang, Shuaipeng; Zhao, Wenlong; Zhou, Zhimei; Yuan, Yuandong; Fu, Dengyuan; Zhu, Yinfang."Temperature and humidity sensor based on MEMS technology".AIP ADVANCES 11.8(2021):85126. |
入库方式： OAI收割
来源：半导体研究所
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