Polarity tuning of crystalline AlN films utilizing trace oxygen involved sputtering and post-high-temperature annealing
文献类型：期刊论文
| 作者 | Liu, Zhibin; Guo, Yanan; Yan, Jianchang; Zeng, Yiping; Wang, Junxi; Li, Jinmin |
| 刊名 | APPLIED PHYSICS EXPRESS
 |
| 出版日期 | 2021 |
| 卷号 | 14期号:8页码:85501 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31026]  |
| 专题 | 半导体研究所_中科院半导体照明研发中心 |
| 推荐引用方式 GB/T 7714 | Liu, Zhibin; Guo, Yanan; Yan, Jianchang; Zeng, Yiping; Wang, Junxi; Li, Jinmin. Polarity tuning of crystalline AlN films utilizing trace oxygen involved sputtering and post-high-temperature annealing[J]. APPLIED PHYSICS EXPRESS,2021,14(8):85501. |
| APA | Liu, Zhibin; Guo, Yanan; Yan, Jianchang; Zeng, Yiping; Wang, Junxi; Li, Jinmin.(2021).Polarity tuning of crystalline AlN films utilizing trace oxygen involved sputtering and post-high-temperature annealing.APPLIED PHYSICS EXPRESS,14(8),85501. |
| MLA | Liu, Zhibin; Guo, Yanan; Yan, Jianchang; Zeng, Yiping; Wang, Junxi; Li, Jinmin."Polarity tuning of crystalline AlN films utilizing trace oxygen involved sputtering and post-high-temperature annealing".APPLIED PHYSICS EXPRESS 14.8(2021):85501. |
入库方式： OAI收割
来源：半导体研究所
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