Centimeter-scale low-damage micromachining on single-crystal 4H-SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots
文献类型：期刊论文
| 作者 | Long, Jiangyou; Peng, Qingfa; Chen, Gaopan; Zhang, Yuliang; Xie, Xiaozhu; Pan, Guoshun; Wang, Xiaofeng |
| 刊名 | CERAMICS INTERNATIONAL
 |
| 出版日期 | 2021 |
| 卷号 | 47期号:16页码:23134-23143 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30971]  |
| 专题 | 半导体研究所_中科院半导体照明研发中心 |
| 推荐引用方式 GB/T 7714 | Long, Jiangyou; Peng, Qingfa; Chen, Gaopan; Zhang, Yuliang; Xie, Xiaozhu; Pan, Guoshun; Wang, Xiaofeng. Centimeter-scale low-damage micromachining on single-crystal 4H-SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots[J]. CERAMICS INTERNATIONAL,2021,47(16):23134-23143. |
| APA | Long, Jiangyou; Peng, Qingfa; Chen, Gaopan; Zhang, Yuliang; Xie, Xiaozhu; Pan, Guoshun; Wang, Xiaofeng.(2021).Centimeter-scale low-damage micromachining on single-crystal 4H-SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots.CERAMICS INTERNATIONAL,47(16),23134-23143. |
| MLA | Long, Jiangyou; Peng, Qingfa; Chen, Gaopan; Zhang, Yuliang; Xie, Xiaozhu; Pan, Guoshun; Wang, Xiaofeng."Centimeter-scale low-damage micromachining on single-crystal 4H-SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots".CERAMICS INTERNATIONAL 47.16(2021):23134-23143. |
入库方式： OAI收割
来源：半导体研究所
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