Micro-Nano Processing of Active Layers in Flexible Tactile Sensors via Template Methods: A Review
文献类型：期刊论文
| 作者 | Niu, Hongsen; Zhang, Huiyun; Yue, Wenjing; Gao, Song; Kan, Hao; Zhang, Chunwei; Zhang, Congcong; Pang, Jinbo; Lou, Zheng; Wang, Lili; Li, Yang; Liu, Hong; Shen, Guozhen |
| 刊名 | SMALL
 |
| 出版日期 | 2021 |
| 卷号 | 17期号:41页码:2100804 |
| 公开日期 | 2021 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31038]  |
| 专题 | 半导体研究所_半导体超晶格国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Niu, Hongsen; Zhang, Huiyun; Yue, Wenjing; Gao, Song; Kan, Hao; Zhang, Chunwei; Zhang, Congcong; Pang, Jinbo; Lou, Zheng; Wang, Lili; Li, Yang; Liu, Hong; Shen, Guozhen. Micro-Nano Processing of Active Layers in Flexible Tactile Sensors via Template Methods: A Review[J]. SMALL,2021,17(41):2100804. |
| APA | Niu, Hongsen; Zhang, Huiyun; Yue, Wenjing; Gao, Song; Kan, Hao; Zhang, Chunwei; Zhang, Congcong; Pang, Jinbo; Lou, Zheng; Wang, Lili; Li, Yang; Liu, Hong; Shen, Guozhen.(2021).Micro-Nano Processing of Active Layers in Flexible Tactile Sensors via Template Methods: A Review.SMALL,17(41),2100804. |
| MLA | Niu, Hongsen; Zhang, Huiyun; Yue, Wenjing; Gao, Song; Kan, Hao; Zhang, Chunwei; Zhang, Congcong; Pang, Jinbo; Lou, Zheng; Wang, Lili; Li, Yang; Liu, Hong; Shen, Guozhen."Micro-Nano Processing of Active Layers in Flexible Tactile Sensors via Template Methods: A Review".SMALL 17.41(2021):2100804. |
入库方式： OAI收割
来源：半导体研究所
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