Echelle gratings tiling method based on lateral shearing interferometry
文献类型：期刊论文
| 作者 | Y. F. Li; X. T. Mi; X. D. Qi; S. W. Zhang; G. J. Yang; H. Z. Yu; X. T. Li and W. H. Li |
| 刊名 | Optics and Laser Technology
 |
| 出版日期 | 2022 |
| 卷号 | 145期号:7 |
| ISSN号 | 0030-3992 |
| DOI | 10.1016/j.optlastec.2021.107475 |
| 英文摘要 | A method for echelle gratings tiling based on lateral shearing interferometry is proposed. Fringe patterns of the grating assembly are generated by a wedge plate. Mosaic errors can be calculated and corrected by observing the working order and its adjacent order. An experimental mosaic of two 50 mm x 50 mm, 79 grooves/mm echelles is aligned to verify the theory. The rms wavefront is better than 0.04 wavelength. Angular and translation sensitivities of less than 1 arcsec and 10 nm are achieved respectively. |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/65190]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Y. F. Li,X. T. Mi,X. D. Qi,et al. Echelle gratings tiling method based on lateral shearing interferometry[J]. Optics and Laser Technology,2022,145(7). |
| APA | Y. F. Li.,X. T. Mi.,X. D. Qi.,S. W. Zhang.,G. J. Yang.,...&X. T. Li and W. H. Li.(2022).Echelle gratings tiling method based on lateral shearing interferometry.Optics and Laser Technology,145(7). |
| MLA | Y. F. Li,et al."Echelle gratings tiling method based on lateral shearing interferometry".Optics and Laser Technology 145.7(2022). |
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