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High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis

文献类型：期刊论文

作者H. Tu; Y. Zheng; Y. Shan; Y. Chen; H. Zhang; P. Liu; H. Zhao; R. Zhang; S. Wang; J. Li
刊名IEEE Transactions on Instrumentation and Measurement
出版日期2021
卷号70
ISSN号189456
DOI10.1109/TIM.2021.3110323
英文摘要We constructed and investigated a high-speed broadband spectroscopic ellipsometric system with 12 polarization channels and a 2-D charge-coupled device. The system without any mechanically moving component completes the measurements of more than 10 000 polarization signals at 889 data points in a wavelength range of 400-800 nm within 150 ms, with a spectral resolution better than 1 nm. An integrated analyzer consisting of 12 subanalyzers was employed to obtain the light of different polarization states simultaneously. The spectral distribution of different polarization channels was acquired by the spectral data acquisition system in parallel mode. Two kinds of data processing methods were applied to analyze the light intensities of different channels to obtain the ellipsometric information and other physical parameters of the material over a broad spectral range. According to the analysis of measurement results of gold and silicon bulk, and tantalum pentoxide film, the reliability of the proposed instrument was verified, showing application prospects in the field where in situ spectral monitoring is required. 1963-2012 IEEE.
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源URL[http://ir.ciomp.ac.cn/handle/181722/65294]  
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714		 H. Tu,Y. Zheng,Y. Shan,et al. High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis[J]. IEEE Transactions on Instrumentation and Measurement,2021,70.
APA H. Tu.,Y. Zheng.,Y. Shan.,Y. Chen.,H. Zhang.,...&Y. Lee and L. Chen.(2021).High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis.IEEE Transactions on Instrumentation and Measurement,70.
MLA H. Tu,et al."High-Performance Ellipsometry with 2-D Expanded Channels for Spectroscopy and Polarization Analysis".IEEE Transactions on Instrumentation and Measurement 70(2021).

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来源：长春光学精密机械与物理研究所

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