中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures

文献类型:期刊论文

作者Y. P. Jia; Y. T. Shen; X. J. Sun; Z. M. Shi; K. Jiang; T. Wu; H. W. Liang; X. Z. Cui; W. Lu and D. B. Li
刊名Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment
出版日期2021
卷号997页码:6
ISSN号0168-9002
DOI10.1016/j.nima.2021.165166
英文摘要SiC is a typical wide bandgap semiconductor that has demonstrated potential applications in radiation detection and imaging, but its performance must be improved from both a material quality and device design standpoint. In this study, based on a theoretical analysis, we found that it is possible to improve the performance of SiC radiation detectors by changing the device structure from a metal/semiconductor to a metal/insulator/semiconductor design and fabricate and evaluate corresponding devices with alpha particle radiation detection. We experimentally confirmed that introducing an SiO2 dielectric layer can effectively improve the energy resolution of detectors, so the effect of the dielectric layer thickness on detectors' performance was further investigated and clarified. We demonstrated that a device with a 100 nm SiO2 dielectric layer on a 15 mu m SiC epitaxial layer achieved the best energy resolution of 0.55% @-40 V under 5.48 MeV alpha particle irradiation. This study provides further insight to accelerate commercial applications of SiC radiation detectors.
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源URL[http://ir.ciomp.ac.cn/handle/181722/65328]  
专题中国科学院长春光学精密机械与物理研究所
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Y. P. Jia,Y. T. Shen,X. J. Sun,et al. Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures[J]. Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment,2021,997:6.
APA Y. P. Jia.,Y. T. Shen.,X. J. Sun.,Z. M. Shi.,K. Jiang.,...&W. Lu and D. B. Li.(2021).Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures.Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment,997,6.
MLA Y. P. Jia,et al."Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures".Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment 997(2021):6.

入库方式: OAI收割

来源:长春光学精密机械与物理研究所

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