Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition
文献类型:期刊论文
作者 | J. Chen; J. Wang; V. Saravade; I. T. Ferguson; W. Hu; Z. C. Feng and L. Wan |
刊名 | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
出版日期 | 2021 |
卷号 | 39期号:2 |
ISSN号 | 7342101 |
DOI | 10.1116/6.0000816 |
英文摘要 | Optical and material properties of nickel-doped zinc oxide (ZnO-Ni) grown by metalorganic chemical vapor deposition with varying Ni source flow rates are investigated. ZnO-Ni showed a good crystal quality with (002) orientation but deteriorated at high Ni source flow rates. Photoluminescence responses show a reduction in the bandgap of ZnO-Ni with an increase in the Ni source flow and also with an increase in the temperature. Ni-doping can enhance luminescences at low concentrations ( 2021 Author(s). |
URL标识 | 查看原文 |
源URL | [http://ir.ciomp.ac.cn/handle/181722/65448] |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | J. Chen,J. Wang,V. Saravade,et al. Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,2021,39(2). |
APA | J. Chen,J. Wang,V. Saravade,I. T. Ferguson,W. Hu,&Z. C. Feng and L. Wan.(2021).Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition.Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,39(2). |
MLA | J. Chen,et al."Multi-technique investigation of Ni-doped ZnO thin films on sapphire by metalorganic chemical vapor deposition".Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 39.2(2021). |
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