Optical and structural properties of AlN thin films deposited on different faces of sapphire substrates
文献类型：期刊论文
| 作者 | J. Yin; B. Zhou; L. Li; Y. Liu; W. Guo; D. N. Talwar; K. He; I. T. Ferguson; L. Wan and Z. C. Feng |
| 刊名 | Semiconductor Science and Technology
 |
| 出版日期 | 2021 |
| 卷号 | 36期号:4 |
| ISSN号 | 2681242 |
| DOI | 10.1088/1361-6641/abe3c5 |
| 英文摘要 | We report the comprehensive spectroscopic results of AlN thin films deposited on the A-, R- and C-surfaces of sapphire substrates by radio frequency magnetron sputtering. The optical and structural properties of the epitaxial-grown AlN films were characterized using various techniques of high-resolution x-ray diffraction spectroscopy, x-ray photoelectron spectroscopy, Raman scattering spectroscopy, spectroscopic ellipsometry and associated analytical tools. Our large number of measurement results clearly show that sapphire substrates of different polarities have effects on the surface roughness, dislocation density, grain size, microstrain, and surface oxygen binding capacity of the film grown on its surface. The results obtained from Ellipsometry measurements show that the thickness, band gap and roughness of AlN films grown on C-plane sapphire are the smallest among the three samples. After careful analyses of the variable temperature Raman spectra, as the temperature rises from 80 K to 800 K, the AlN film has always exhibited tensile stress. In the same temperature range, the tensile stress of the AlN film grown on the C-plane sapphire has the greatest effect with temperature. The lifetime of E2 (high) phonons gradually decays with the increase of temperature. 2021 IOP Publishing Ltd. |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/65486]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | J. Yin,B. Zhou,L. Li,et al. Optical and structural properties of AlN thin films deposited on different faces of sapphire substrates[J]. Semiconductor Science and Technology,2021,36(4). |
| APA | J. Yin.,B. Zhou.,L. Li.,Y. Liu.,W. Guo.,...&L. Wan and Z. C. Feng.(2021).Optical and structural properties of AlN thin films deposited on different faces of sapphire substrates.Semiconductor Science and Technology,36(4). |
| MLA | J. Yin,et al."Optical and structural properties of AlN thin films deposited on different faces of sapphire substrates".Semiconductor Science and Technology 36.4(2021). |
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