Stress-induced deformation of the coating on large lightweight freeform optics
文献类型：期刊论文
| 作者 | G. Qiao; H. Hu; X. Zhang; X. Luo; D. Xue; G. E. Zhang; H. Hu; L. Yi; Y. U. Yang and W. Deng |
| 刊名 | Optics Express
 |
| 出版日期 | 2021 |
| 卷号 | 29期号:4页码:4755-4769 |
| ISSN号 | 10944087 |
| DOI | 10.1364/OE.414953 |
| 英文摘要 | Large aperture, lightweight optics are frequently utilized in modern optical systems. However, despite the use of advanced techniques for developing their materials, fabrication, and mechanical structure, the coatings placed on the substrates induce slight lattice mismatches and increase the thin film stress on polished surfaces. This significantly distorts nano-accuracy optical surfaces, especially on lightweight freeform surfaces. In this study, we construct a finite element model (FEM) and a ray tracing model to estimate the impact of the stress-induced deformation of the coating on a 1.5m class lightweight silicon carbine (SiC) mirror with a freeform surface. Our simulation results are within 10% deviation from the experimental results, and the deformation texture map matches these results as well. We discuss several possible strategies to overcome stress-induced deformation, including fabrication pre-compensation, lightweight structure redesign, and an inverse print-through effect. 2021 Optical Society of America. |
| URL标识 | 查看原文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/65658]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | G. Qiao,H. Hu,X. Zhang,et al. Stress-induced deformation of the coating on large lightweight freeform optics[J]. Optics Express,2021,29(4):4755-4769. |
| APA | G. Qiao.,H. Hu.,X. Zhang.,X. Luo.,D. Xue.,...&Y. U. Yang and W. Deng.(2021).Stress-induced deformation of the coating on large lightweight freeform optics.Optics Express,29(4),4755-4769. |
| MLA | G. Qiao,et al."Stress-induced deformation of the coating on large lightweight freeform optics".Optics Express 29.4(2021):4755-4769. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。