Design and Control of Pressure-Swing Heat Integration Distillation for the Trichlorosilane Purification Process
文献类型:期刊论文
作者 | Yin, Min1,2; Hua, Chao1,2; Lu, Ping1,2; Zhang, Haohao1,2,3; Bai, Fang1,2,3 |
刊名 | ACS OMEGA
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出版日期 | 2022-03-22 |
卷号 | 7期号:11页码:9254-9266 |
ISSN号 | 2470-1343 |
DOI | 10.1021/acsomega.1c05943 |
英文摘要 | Trichlorosilane (TCS) is a crucial intermediate product in the polysilicon manufacturing process, and its purification consumes a significant amount of energy. The design and control of the TCS heat integration pressure-swing distillation (HIPSD) process was investigated using Aspen Plus V8.4 and Aspen dynamics in this study. Three partial processes and one full HIPSD process were investigated by adjusting the operating conditions and rationally configuring the material flow. Compared with the conventional distillation process, the partial and full HIPSD can reduce total annual cost by 15.75 and 27.39%, respectively. The aforementioned process was controlled robustly by adding the ratio of reboiler heat duty to feed (Q(R)/F) feedforward control structure and the ratio of recycle to feed (F-REC/F) control structure. In addition, the performance of the control structure was evaluated by introducing +/- 10% disturbances of the feed flowrate and composition. To compare the performance of the control structure, the integral squared error value is combined with the dynamic response curve. The full HIPSD scheme can resist +/- 10% disturbances of flow and composition with the best economic performance. This study has certain reference significance for the distillation process and control strategy design of TCS in the polysilicon manufacturing process. |
WOS关键词 | EXTRACTIVE DISTILLATION ; TERNARY MIXTURE ; SEPARATION ; SYSTEM ; COLUMN ; PUMP |
资助项目 | National Key Research and Development Program of China[2019YFC1907600] ; Innovation Academy for Green Manufacture, Chinese Academy of Sciences[IAGM2020C08] |
WOS研究方向 | Chemistry |
语种 | 英语 |
WOS记录号 | WOS:000783849700016 |
出版者 | AMER CHEMICAL SOC |
资助机构 | National Key Research and Development Program of China ; Innovation Academy for Green Manufacture, Chinese Academy of Sciences |
源URL | [http://ir.ipe.ac.cn/handle/122111/52835] ![]() |
专题 | 中国科学院过程工程研究所 |
通讯作者 | Hua, Chao |
作者单位 | 1.Chinese Acad Sci, Innovat Acad Green Mfg, Beijing 100190, Peoples R China 2.Chinese Acad Sci, Inst Proc Engn, Key Lab Green Proc & Engn, Beijing 100190, Peoples R China 3.Univ Chinese Acad Sci, Sch Chem & Engn, Beijing 100190, Peoples R China |
推荐引用方式 GB/T 7714 | Yin, Min,Hua, Chao,Lu, Ping,et al. Design and Control of Pressure-Swing Heat Integration Distillation for the Trichlorosilane Purification Process[J]. ACS OMEGA,2022,7(11):9254-9266. |
APA | Yin, Min,Hua, Chao,Lu, Ping,Zhang, Haohao,&Bai, Fang.(2022).Design and Control of Pressure-Swing Heat Integration Distillation for the Trichlorosilane Purification Process.ACS OMEGA,7(11),9254-9266. |
MLA | Yin, Min,et al."Design and Control of Pressure-Swing Heat Integration Distillation for the Trichlorosilane Purification Process".ACS OMEGA 7.11(2022):9254-9266. |
入库方式: OAI收割
来源:过程工程研究所
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