中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页 机构 成果 学者
  
  1. CAS IR Grid
  2. 金属研究所
  3. 中国科学院金属研究所
Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition

文献类型：期刊论文

作者Liu, Zitong2,3; Shen, Longhai1; Chen, Jianjin1; Zhang, Xinglai3
刊名JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
出版日期2022-04-08
页码9
ISSN号0957-4522
DOI10.1007/s10854-022-08152-6
通讯作者Shen, Longhai(shenlonghai@163.com) ; Zhang, Xinglai(zhangxl@imr.ac.cn)
英文摘要AlGaN ternary alloy nanostructures have emerged as an important building block for optoelectronic devices and exhibit broad application prospects. However, the fabrication of AlGaN nanostructures with high quality, especially high Al composition, by chemical vapor deposition (CVD) is limited by their phase separation. Here, AlGaN ternary alloy nanostructures with Al/Ga atomic ratio more than 90% are synthesized by using CVD method. The AlGaN nanocones and nanorods are obtained by adjusting the Ar/NH3 flow ratio at the same temperature. Furthermore, it is found that the increase of Ar flux is more favorable to the transport of Ga source, which leads to the raise of Ga content in AlGaN nanostructures. On the other hand, the decrease of NH3 flow is conducive to the formation of nanorods. Moreover, the pre-deposited Al powder on Si substrate provides Al-rich growth conditions and nucleation sites for AlGaN nanostructures, which becomes the key to the formation of AlGaN nanostructures with high Al composition. Based on the evolution of morphology, the growth process of AlGaN nanostructures is investigated by a self-catalytic vapor-solid mechanism.
资助项目Youth Innovation Promotion Association of the Chinese Academy of Sciences[2019197] ; Open Project of State Key Laboratory of Superhard Materials, Jilin University[202004]
WOS研究方向Engineering ; Materials Science ; Physics
语种英语
WOS记录号WOS:000781264400004
出版者SPRINGER
资助机构Youth Innovation Promotion Association of the Chinese Academy of Sciences ; Open Project of State Key Laboratory of Superhard Materials, Jilin University
源URL[http://ir.imr.ac.cn/handle/321006/172851]  
专题金属研究所_中国科学院金属研究所
通讯作者Shen, Longhai; Zhang, Xinglai
作者单位1.Shenyang Ligong Univ, Sch Sci, Shenyang 110159, Peoples R China
2.Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China
3.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Peoples R China
推荐引用方式
GB/T 7714		 Liu, Zitong,Shen, Longhai,Chen, Jianjin,et al. Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2022:9.
APA Liu, Zitong,Shen, Longhai,Chen, Jianjin,&Zhang, Xinglai.(2022).Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,9.
MLA Liu, Zitong,et al."Self-catalytic growth and characterization of AlGaN nanostructures with high Al composition".JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS (2022):9.

入库方式： OAI收割

来源：金属研究所

浏览0
下载0
收藏0
其他版本

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。