Influence of material type and surface roughness of substrate on boronization and its performance
文献类型：期刊论文
| 作者 | Tian, Xiaorang; Meng, Chuizhou; Zhao, Xin; Liu, Bing; Zhao, Guanchao; Nie, Ge; Yang, Guoyun; Zhang, Guosong; Han, Peide |
| 刊名 | VACUUM
 |
| 出版日期 | 2021 |
| 卷号 | 187页码:110091 |
| 语种 | 英语 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31200]  |
| 专题 | 半导体研究所_光电子研究发展中心 |
| 推荐引用方式 GB/T 7714 | Tian, Xiaorang; Meng, Chuizhou; Zhao, Xin; Liu, Bing; Zhao, Guanchao; Nie, Ge; Yang, Guoyun; Zhang, Guosong; Han, Peide. Influence of material type and surface roughness of substrate on boronization and its performance[J]. VACUUM,2021,187:110091. |
| APA | Tian, Xiaorang; Meng, Chuizhou; Zhao, Xin; Liu, Bing; Zhao, Guanchao; Nie, Ge; Yang, Guoyun; Zhang, Guosong; Han, Peide.(2021).Influence of material type and surface roughness of substrate on boronization and its performance.VACUUM,187,110091. |
| MLA | Tian, Xiaorang; Meng, Chuizhou; Zhao, Xin; Liu, Bing; Zhao, Guanchao; Nie, Ge; Yang, Guoyun; Zhang, Guosong; Han, Peide."Influence of material type and surface roughness of substrate on boronization and its performance".VACUUM 187(2021):110091. |
入库方式： OAI收割
来源：半导体研究所
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