TiO2?x films for bolometer applications: recent progress and perspectives
文献类型：期刊论文
| 作者 | Zhang,Qiming2; Yan,Ruiyang3; Peng,Xiaoyan1,2; Wang,YuShui4; Feng,Shuanglong3
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| 刊名 | Materials Research Express
 |
| 出版日期 | 2022 |
| 卷号 | 9期号:1 |
| 关键词 | bolometer TiO2?x TCR |
| DOI | 10.1088/2053-1591/ac4327 |
| 通讯作者 | Feng,Shuanglong() |
| 英文摘要 | Abstract The bolometer is widely used in military and civilian infrared imaging due to its advantages of non-cooling, small size and portability. Thermosensitive materials seriously affect the performance of bolometers. As a kind of heat-sensitive material, the TiO2?x material has the advantages of good thermal stability, large-area preparation, and compatibility with the complementary metal-oxide semiconductor (CMOS) process. However, there is almost no review on the application of titanium oxide for bolometers. In this paper, we introduce the bolometer’s main thermal and photoelectric performance parameters and the critical technologies to manufacture the bolometer. Finally, we will particularly emphasize the effects of preparation process parameters of TiO2 on the performance parameters temperature coefficient of resistance (TCR), 1/f noise, etc. |
| 语种 | 英语 |
| WOS记录号 | IOP:MRX_9_1_012002 |
| 出版者 | IOP Publishing |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/15240]  |
| 专题 | 中国科学院重庆绿色智能技术研究院 |
| 通讯作者 | Feng,Shuanglong |
| 作者单位 | 1.Key Laboratory of Luminescence Analysis and Molecular Sensing Ministry of Education, Southwest University, Chongqing, 400715, People’s Republic of China 2.Chongqing Key Laboratory of Brain-inspired Computing and Intelligent Control, College of Artificial Intelligence, Southwest University, Chongqing, 400715, People’s Republic of China 3.Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing, 400714, People’s Republic of China 4.Jiaozuo Normal College, Jiaozuo, Henan, 454000, People’s Republic of China |
| 推荐引用方式 GB/T 7714 | Zhang,Qiming,Yan,Ruiyang,Peng,Xiaoyan,et al. TiO2?x films for bolometer applications: recent progress and perspectives[J]. Materials Research Express,2022,9(1). |
| APA | Zhang,Qiming,Yan,Ruiyang,Peng,Xiaoyan,Wang,YuShui,&Feng,Shuanglong.(2022).TiO2?x films for bolometer applications: recent progress and perspectives.Materials Research Express,9(1). |
| MLA | Zhang,Qiming,et al."TiO2?x films for bolometer applications: recent progress and perspectives".Materials Research Express 9.1(2022). |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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