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TiO2-x films for bolometer applications: recent progress and perspectives

文献类型：期刊论文

作者Zhang, Qiming3; Yan, Ruiyang1; Peng, Xiaoyan3,4; Wang, YuShui2; Feng, Shuanglong1
刊名MATERIALS RESEARCH EXPRESS
出版日期2022
卷号9期号:1页码:27
关键词bolometer TiO2-x TCR
DOI10.1088/2053-1591/ac4327
通讯作者Peng, Xiaoyan(pengxy2015@swu.edu.cn) ; Feng, Shuanglong(fengshuanglong@cigit.ac.cn)
英文摘要The bolometer is widely used in military and civilian infrared imaging due to its advantages of non-cooling, small size and portability. Thermosensitive materials seriously affect the performance of bolometers. As a kind of heat-sensitive material, the TiO2-x material has the advantages of good thermal stability, large-area preparation, and compatibility with the complementary metal-oxide semiconductor (CMOS) process. However, there is almost no review on the application of titanium oxide for bolometers. In this paper, we introduce the bolometer's main thermal and photoelectric performance parameters and the critical technologies to manufacture the bolometer. Finally, we will particularly emphasize the effects of preparation process parameters of TiO2 on the performance parameters temperature coefficient of resistance (TCR), 1/f noise, etc.
资助项目National Natural Science Foundation of China[61804127] ; Key R&D Plan of the Ministry of Science and Technology[2017YFE0131900] ; Western Light Program of the Chinese Academy of Sciences
WOS研究方向Materials Science
语种英语
出版者IOP Publishing Ltd
WOS记录号WOS:000784479600001
源URL[http://119.78.100.138/handle/2HOD01W0/15557]  
专题中国科学院重庆绿色智能技术研究院
通讯作者Peng, Xiaoyan; Feng, Shuanglong
作者单位1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China
2.Jiaozuo Normal Coll, Jiaozuo 454000, Henan, Peoples R China
3.Southwest Univ, Chongqing Key Lab Brain inspired Comp & Intellige, Coll Artificial Intelligence, Chongqing 400715, Peoples R China
4.Southwest Univ, Key Lab Luminescence Anal & Mol Sensing, Minist Educ, Chongqing 400715, Peoples R China
推荐引用方式
GB/T 7714		 Zhang, Qiming,Yan, Ruiyang,Peng, Xiaoyan,et al. TiO2-x films for bolometer applications: recent progress and perspectives[J]. MATERIALS RESEARCH EXPRESS,2022,9(1):27.
APA Zhang, Qiming,Yan, Ruiyang,Peng, Xiaoyan,Wang, YuShui,&Feng, Shuanglong.(2022).TiO2-x films for bolometer applications: recent progress and perspectives.MATERIALS RESEARCH EXPRESS,9(1),27.
MLA Zhang, Qiming,et al."TiO2-x films for bolometer applications: recent progress and perspectives".MATERIALS RESEARCH EXPRESS 9.1(2022):27.

入库方式： OAI收割

来源：重庆绿色智能技术研究院

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