Evaluation of LEC and VGF-InAs substrates through surface defect characterization and epitaxy growth
文献类型：期刊论文
| 作者 | Liu, Lijie; Zhao, Youwen; Huang, Yong; Zhao, Yu; Xie, Hui; Wang, Jun; Wang, Yingli; Shen, Guiying |
| 刊名 | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
 |
| 出版日期 | 2021 |
| 卷号 | 125页码:105624 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31329]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Liu, Lijie; Zhao, Youwen; Huang, Yong; Zhao, Yu; Xie, Hui; Wang, Jun; Wang, Yingli; Shen, Guiying. Evaluation of LEC and VGF-InAs substrates through surface defect characterization and epitaxy growth[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2021,125:105624. |
| APA | Liu, Lijie; Zhao, Youwen; Huang, Yong; Zhao, Yu; Xie, Hui; Wang, Jun; Wang, Yingli; Shen, Guiying.(2021).Evaluation of LEC and VGF-InAs substrates through surface defect characterization and epitaxy growth.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,125,105624. |
| MLA | Liu, Lijie; Zhao, Youwen; Huang, Yong; Zhao, Yu; Xie, Hui; Wang, Jun; Wang, Yingli; Shen, Guiying."Evaluation of LEC and VGF-InAs substrates through surface defect characterization and epitaxy growth".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 125(2021):105624. |
入库方式： OAI收割
来源：半导体研究所
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