Residual stress distribution and flatness of dislocation-free Te-GaSb (100) substrate
文献类型：期刊论文
| 作者 | Zhou, Yuan; Zhao, Youwen; Xie, Hui; Shen, Guiying; Liu, Jingming; Yang, Jun |
| 刊名 | JAPANESE JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2021 |
| 卷号 | 60期号:3页码:35510 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31364]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Zhou, Yuan; Zhao, Youwen; Xie, Hui; Shen, Guiying; Liu, Jingming; Yang, Jun. Residual stress distribution and flatness of dislocation-free Te-GaSb (100) substrate[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2021,60(3):35510. |
| APA | Zhou, Yuan; Zhao, Youwen; Xie, Hui; Shen, Guiying; Liu, Jingming; Yang, Jun.(2021).Residual stress distribution and flatness of dislocation-free Te-GaSb (100) substrate.JAPANESE JOURNAL OF APPLIED PHYSICS,60(3),35510. |
| MLA | Zhou, Yuan; Zhao, Youwen; Xie, Hui; Shen, Guiying; Liu, Jingming; Yang, Jun."Residual stress distribution and flatness of dislocation-free Te-GaSb (100) substrate".JAPANESE JOURNAL OF APPLIED PHYSICS 60.3(2021):35510. |
入库方式： OAI收割
来源：半导体研究所
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