Physical properties and structure characteristics of titanium-modified antimony-selenium phase change thin film
文献类型：期刊论文
| 作者 | Wu, Weihua; Sun, Yuemei; Zhu, Xiaoqin; Shen, Bo; Zhai, Jiwei; Yue, Zhenxing |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2021 |
| 卷号 | 118期号:8页码:81903 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31369]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Wu, Weihua; Sun, Yuemei; Zhu, Xiaoqin; Shen, Bo; Zhai, Jiwei; Yue, Zhenxing. Physical properties and structure characteristics of titanium-modified antimony-selenium phase change thin film[J]. APPLIED PHYSICS LETTERS,2021,118(8):81903. |
| APA | Wu, Weihua; Sun, Yuemei; Zhu, Xiaoqin; Shen, Bo; Zhai, Jiwei; Yue, Zhenxing.(2021).Physical properties and structure characteristics of titanium-modified antimony-selenium phase change thin film.APPLIED PHYSICS LETTERS,118(8),81903. |
| MLA | Wu, Weihua; Sun, Yuemei; Zhu, Xiaoqin; Shen, Bo; Zhai, Jiwei; Yue, Zhenxing."Physical properties and structure characteristics of titanium-modified antimony-selenium phase change thin film".APPLIED PHYSICS LETTERS 118.8(2021):81903. |
入库方式： OAI收割
来源：半导体研究所
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