The influence of temperature and TMGa flow rate on the quality of p-GaN
文献类型：期刊论文
| 作者 | Cao, Zikun; Wang, Xiaowei; Zhao, Degang; Liang, Feng; Liu, Zongshun |
| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2021 |
| 卷号 | 11期号:3页码:35109 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31345]  |
| 专题 | 半导体研究所_光电子研究发展中心 |
| 推荐引用方式 GB/T 7714 | Cao, Zikun; Wang, Xiaowei; Zhao, Degang; Liang, Feng; Liu, Zongshun. The influence of temperature and TMGa flow rate on the quality of p-GaN[J]. AIP ADVANCES,2021,11(3):35109. |
| APA | Cao, Zikun; Wang, Xiaowei; Zhao, Degang; Liang, Feng; Liu, Zongshun.(2021).The influence of temperature and TMGa flow rate on the quality of p-GaN.AIP ADVANCES,11(3),35109. |
| MLA | Cao, Zikun; Wang, Xiaowei; Zhao, Degang; Liang, Feng; Liu, Zongshun."The influence of temperature and TMGa flow rate on the quality of p-GaN".AIP ADVANCES 11.3(2021):35109. |
入库方式： OAI收割
来源：半导体研究所
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