Coupled Investigation of Contact Potential and Microstructure Evolution of Ultra-Thin AlOx for Crystalline Si Passivation
文献类型：期刊论文
| 作者 | Zheng, Zhen; An, Junyang; Gong, Ruiling; Zeng, Yuheng; Ye, Jichun; Yu, Linwei; Florea, Ileana; Cabarrocas, Pere Roca, I; Chen, Wanghua |
| 刊名 | NANOMATERIALS
 |
| 出版日期 | 2021 |
| 卷号 | 11期号:7 |
| 关键词 | ATOMIC LAYER DEPOSITION SURFACE PASSIVATION CHARGE DYNAMICS ALUMINUM-OXIDE LIGHT-SOAKING SILICON AL2O3 INTERFACE STABILITY STACKS |
| 英文摘要 | In this work, we report the same trends for the contact potential difference measured by Kelvin probe force microscopy and the effective carrier lifetime on crystalline silicon (c-Si) wafers passivated by AlOx layers of different thicknesses and submitted to annealing under various conditions. The changes in contact potential difference values and in the effective carrier lifetimes of the wafers are discussed in view of structural changes of the c-Si/SiO2/AlOx interface thanks to high resolution transmission electron microscopy. Indeed, we observed the presence of a crystalline silicon oxide interfacial layer in as-deposited (200 degrees C) AlOx, and a phase transformation from crystalline to amorphous silicon oxide when they were annealed in vacuum at 300 degrees C. |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/21777]  |
| 专题 | 中国科学院宁波材料技术与工程研究所 2021专题_期刊论文 |
| 作者单位 | Chen, WH (corresponding author), Ningbo Univ, Sch Phys Sci & Technol, Ningbo 315211, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Zheng, Zhen,An, Junyang,Gong, Ruiling,et al. Coupled Investigation of Contact Potential and Microstructure Evolution of Ultra-Thin AlOx for Crystalline Si Passivation[J]. NANOMATERIALS,2021,11(7). |
| APA | Zheng, Zhen.,An, Junyang.,Gong, Ruiling.,Zeng, Yuheng.,Ye, Jichun.,...&Chen, Wanghua.(2021).Coupled Investigation of Contact Potential and Microstructure Evolution of Ultra-Thin AlOx for Crystalline Si Passivation.NANOMATERIALS,11(7). |
| MLA | Zheng, Zhen,et al."Coupled Investigation of Contact Potential and Microstructure Evolution of Ultra-Thin AlOx for Crystalline Si Passivation".NANOMATERIALS 11.7(2021). |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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