Highly sensitive and selective H2S gas sensor based on TiO2 thin films
文献类型:期刊论文
作者 | Nagmani; Pravarthana, D.; Tyagi, A.; Jagadale, T. C.; Prellier, W.; Aswal, D. K. |
刊名 | APPLIED SURFACE SCIENCE |
出版日期 | 2021 |
卷号 | 549 |
英文摘要 | Hydrogen Sulfide (H2S) gas sensors with very high sensitivity, selectivity, and quick responses are highly demanding for practical industrial applications. However, achieving it remains a challenging due to high-cost fabrication, poor selectivity, and stability of existing sensor materials. In this work, we report the nanocrystalline TiO2 thin film based highly selective H2S sensor on a silicon substrate, which exhibits superior sensor response of similar to 112000% and similar to 85% at 50 ppm and 100 ppb concentration of H2S gas, respectively when operated at 100 degrees C. Also, it exhibits quick response time (similar to 48 s) and fast recovery time (5 min) with long term stability in H2S gas sensing. The sensitivity of H2S gas on the TiO2 film is related to its surface roughness and excessive chemisorbed oxygen on the surface of the film. Thus, it was found that TiO2 thin film with appropriate roughness and defects plays a significant role in achieving a much better H2S selectivity and sensitivity properties at lower ppm detection for the H2S gas sensor. |
源URL | [http://ir.nimte.ac.cn/handle/174433/21886] |
专题 | 中国科学院宁波材料技术与工程研究所 2021专题_期刊论文 |
作者单位 | 1.Jagadale, TC (corresponding author), Bhabha Atom Res Ctr, Tech Phys Div, Thin Film Devices Sect, Mumbai 400085, Maharashtra, India. 2.Pravarthana, D (corresponding author), Normandie Univ, Lab CRISMAT, ENSICAEN, CNRS UMR 6508, 6 Bd Marechal Juin, F-14050 Caen 4, France. |
推荐引用方式 GB/T 7714 | Nagmani,Pravarthana, D.,Tyagi, A.,et al. Highly sensitive and selective H2S gas sensor based on TiO2 thin films[J]. APPLIED SURFACE SCIENCE,2021,549. |
APA | Nagmani,Pravarthana, D.,Tyagi, A.,Jagadale, T. C.,Prellier, W.,&Aswal, D. K..(2021).Highly sensitive and selective H2S gas sensor based on TiO2 thin films.APPLIED SURFACE SCIENCE,549. |
MLA | Nagmani,et al."Highly sensitive and selective H2S gas sensor based on TiO2 thin films".APPLIED SURFACE SCIENCE 549(2021). |
入库方式: OAI收割
来源:宁波材料技术与工程研究所
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