Large solubility of silicon in an incongruent nitride: The case of reactively magnetron co-sputtered W-Si-N coatings
文献类型:期刊论文
作者 | Bai, Xue; Li, Ke; Chen, Yuyun; Feng, Qing; Ge, Fangfang; Huang, Feng |
刊名 | SURFACE & COATINGS TECHNOLOGY
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出版日期 | 2021 |
卷号 | 412 |
关键词 | NANOCOMPOSITE COATINGS OXIDATION RESISTANCE PHASE-EQUILIBRIA COLUMNAR GROWTH HARD FILMS DESIGN |
英文摘要 | Here we examine the equilibrium solubility of silicon in a nitride matrix with a relatively low bond ionicity (i.e., the incongruent W2N). By reactively magnetron co-sputtering under a kinetically unconstrained growth condition, we systematically increased the amount of silicon in W-Si-N coatings, and investigated in detail the composition, chemical bonding, phases, and microstructure through a combination of energy-dispersive x-ray spectrometry, x-ray photoelectron spectroscopy, x-ray diffractometry, scanning electron microscopy, and transmission electron microscopy. Up to a 12 at.% Si content was dissolved in the W2N matrix; the well-crystallized NaCl-structured W-Si-N solid solution exhibited an uninterrupted fibrous growth structure through the whole thickness (similar to 4 mu m). Beyond this critical solubility, the coatings turned into nanocomposites in which some silicon nitride was segregated as a second phase and interrupted the vertical growth of nanocolumns. The large solubility was rationalized in terms of the electrochemical affinity between silicon nitride and the incongruent W2N. This finding highlights the importance of thermodynamic aspects in developing novel nanocomposite structures. |
源URL | [http://ir.nimte.ac.cn/handle/174433/22002] ![]() |
专题 | 中国科学院宁波材料技术与工程研究所 2021专题_期刊论文 |
作者单位 | 1.Ge, FF (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Engn Lab Adv Energy Mat, Ningbo 315201, Peoples R China. 2.Feng, Q (corresponding author), Chongqing Normal Univ, Coll Phys & Elect Engn, Chongqing Key Lab Photo Elect Funct Mat, Chongqing 401331, Peoples R China. |
推荐引用方式 GB/T 7714 | Bai, Xue,Li, Ke,Chen, Yuyun,et al. Large solubility of silicon in an incongruent nitride: The case of reactively magnetron co-sputtered W-Si-N coatings[J]. SURFACE & COATINGS TECHNOLOGY,2021,412. |
APA | Bai, Xue,Li, Ke,Chen, Yuyun,Feng, Qing,Ge, Fangfang,&Huang, Feng.(2021).Large solubility of silicon in an incongruent nitride: The case of reactively magnetron co-sputtered W-Si-N coatings.SURFACE & COATINGS TECHNOLOGY,412. |
MLA | Bai, Xue,et al."Large solubility of silicon in an incongruent nitride: The case of reactively magnetron co-sputtered W-Si-N coatings".SURFACE & COATINGS TECHNOLOGY 412(2021). |
入库方式: OAI收割
来源:宁波材料技术与工程研究所
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