Substrate-bias-aided preparation and properties of amorphous gallium oxide films and their deep-ultraviolet photodetectors
文献类型：期刊论文
| 作者 | Pei, Yu; Liang, Lingyan; Wang, XiaoLong; Wang, Kun; Zhang, HengBo; Wu, ZhenDong; Wu, HaiJuan; Zhang, Hongliang; Gao, Junhua; Cao, Hongtao |
| 刊名 | CERAMICS INTERNATIONAL
 |
| 出版日期 | 2021 |
| 卷号 | 47期号:22页码:32138-32143 |
| 关键词 | THIN-FILMS TEMPERATURE GROWTH |
| 英文摘要 | Amorphous gallium oxide (a-GaOx) thin films are fabricated via magnetron sputtering at room temperature by regulating the substrate bias voltage (V-s) in a wide range (0 similar to -184 V). The effect of V-s on the performance of a-GaOx films and their photodetector devices, such as the chemical composition, optical, morphological, and electrical properties, are systematically investigated. It's found that both the refractive index and the film relative mass density are highly dependent on the Ga/O ratio that can be effectively modified by the Vs. And the subband trap density or/and microvoid defects in a-GaOx films can be largely reduced under a well-selected V-s. The deep-ultraviolet photodetectors based on the optimized a-GaOx thin films show a responsivity of nearly 13 A/W with an ultrahigh UV/vis. rejection ratio. The research suggests that substrate bias voltage may be a feasibly subsidiary method for low-temperature magnetron sputtering technology with respect to the quality control of aGaO(x) films. |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/21310]  |
| 专题 | 2021专题_期刊论文 |
| 作者单位 | 1.Liang, LY 2.Cao, HT (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Lab Adv Nano Mat & Devices, Ningbo 315201, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Pei, Yu,Liang, Lingyan,Wang, XiaoLong,et al. Substrate-bias-aided preparation and properties of amorphous gallium oxide films and their deep-ultraviolet photodetectors[J]. CERAMICS INTERNATIONAL,2021,47(22):32138-32143. |
| APA | Pei, Yu.,Liang, Lingyan.,Wang, XiaoLong.,Wang, Kun.,Zhang, HengBo.,...&Cao, Hongtao.(2021).Substrate-bias-aided preparation and properties of amorphous gallium oxide films and their deep-ultraviolet photodetectors.CERAMICS INTERNATIONAL,47(22),32138-32143. |
| MLA | Pei, Yu,et al."Substrate-bias-aided preparation and properties of amorphous gallium oxide films and their deep-ultraviolet photodetectors".CERAMICS INTERNATIONAL 47.22(2021):32138-32143. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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