A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass-Silicon Composite Wafers
文献类型：期刊论文
| 作者 | He, Yurong; Si, Chaowei; Han, Guowei; Zhao, Yongmei; Ning, Jin; Yang, Fuhua |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2021 |
| 卷号 | 12期号:2页码:102 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31378]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | He, Yurong; Si, Chaowei; Han, Guowei; Zhao, Yongmei; Ning, Jin; Yang, Fuhua. A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass-Silicon Composite Wafers[J]. MICROMACHINES,2021,12(2):102. |
| APA | He, Yurong; Si, Chaowei; Han, Guowei; Zhao, Yongmei; Ning, Jin; Yang, Fuhua.(2021).A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass-Silicon Composite Wafers.MICROMACHINES,12(2),102. |
| MLA | He, Yurong; Si, Chaowei; Han, Guowei; Zhao, Yongmei; Ning, Jin; Yang, Fuhua."A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass-Silicon Composite Wafers".MICROMACHINES 12.2(2021):102. |
入库方式： OAI收割
来源：半导体研究所
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