Novel narrowband radio frequency microelectromechanical systems filters
文献类型：期刊论文
| 作者 | Liu, Wenli; Chen, Zeji; Kan, Xiao; Wang, Tianyun; Jia, Qianqian; Zhu, Yinfang; Zhao, Jicong; Yuan, Quan; Yang, Jinling; Yang, Fuhua |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2021 |
| 卷号 | 31期号:2页码:25003 |
| 语种 | 英语 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31381]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Liu, Wenli; Chen, Zeji; Kan, Xiao; Wang, Tianyun; Jia, Qianqian; Zhu, Yinfang; Zhao, Jicong; Yuan, Quan; Yang, Jinling; Yang, Fuhua. Novel narrowband radio frequency microelectromechanical systems filters[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2021,31(2):25003. |
| APA | Liu, Wenli; Chen, Zeji; Kan, Xiao; Wang, Tianyun; Jia, Qianqian; Zhu, Yinfang; Zhao, Jicong; Yuan, Quan; Yang, Jinling; Yang, Fuhua.(2021).Novel narrowband radio frequency microelectromechanical systems filters.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,31(2),25003. |
| MLA | Liu, Wenli; Chen, Zeji; Kan, Xiao; Wang, Tianyun; Jia, Qianqian; Zhu, Yinfang; Zhao, Jicong; Yuan, Quan; Yang, Jinling; Yang, Fuhua."Novel narrowband radio frequency microelectromechanical systems filters".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 31.2(2021):25003. |
入库方式： OAI收割
来源：半导体研究所
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