Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching
文献类型：期刊论文
| 作者 | Ma, Jing; Zhao, Yongqiang; Liu, Wen; Song, Peishuai; Yang, Liangliang; Wei, Jiangtao; Yang, Fuhua; Wang, Xiaodong |
| 刊名 | NANOSCALE RESEARCH LETTERS
 |
| 出版日期 | 2021 |
| 卷号 | 16期号:1页码:15 |
| 语种 | 英语 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31406]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Ma, Jing; Zhao, Yongqiang; Liu, Wen; Song, Peishuai; Yang, Liangliang; Wei, Jiangtao; Yang, Fuhua; Wang, Xiaodong. Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching[J]. NANOSCALE RESEARCH LETTERS,2021,16(1):15. |
| APA | Ma, Jing; Zhao, Yongqiang; Liu, Wen; Song, Peishuai; Yang, Liangliang; Wei, Jiangtao; Yang, Fuhua; Wang, Xiaodong.(2021).Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching.NANOSCALE RESEARCH LETTERS,16(1),15. |
| MLA | Ma, Jing; Zhao, Yongqiang; Liu, Wen; Song, Peishuai; Yang, Liangliang; Wei, Jiangtao; Yang, Fuhua; Wang, Xiaodong."Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching".NANOSCALE RESEARCH LETTERS 16.1(2021):15. |
入库方式： OAI收割
来源：半导体研究所
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