Heterogeneous integration of InP and Si3N4 waveguides based on interlayer coupling for an integrated optical gyroscope
文献类型:期刊论文
作者 | He, Yuming; Lu, Ziqing; Kuai, Xuebao; Feng, Zuo; Han, Weihua; Li, Zhaofeng; Yan, Wei; Yang, Fuhua |
刊名 | APPLIED OPTICS
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出版日期 | 2021 |
卷号 | 60期号:3页码:662-669 |
源URL | [http://ir.semi.ac.cn/handle/172111/31408] ![]() |
专题 | 半导体研究所_半导体集成技术工程研究中心 |
推荐引用方式 GB/T 7714 | He, Yuming; Lu, Ziqing; Kuai, Xuebao; Feng, Zuo; Han, Weihua; Li, Zhaofeng; Yan, Wei; Yang, Fuhua. Heterogeneous integration of InP and Si3N4 waveguides based on interlayer coupling for an integrated optical gyroscope[J]. APPLIED OPTICS,2021,60(3):662-669. |
APA | He, Yuming; Lu, Ziqing; Kuai, Xuebao; Feng, Zuo; Han, Weihua; Li, Zhaofeng; Yan, Wei; Yang, Fuhua.(2021).Heterogeneous integration of InP and Si3N4 waveguides based on interlayer coupling for an integrated optical gyroscope.APPLIED OPTICS,60(3),662-669. |
MLA | He, Yuming; Lu, Ziqing; Kuai, Xuebao; Feng, Zuo; Han, Weihua; Li, Zhaofeng; Yan, Wei; Yang, Fuhua."Heterogeneous integration of InP and Si3N4 waveguides based on interlayer coupling for an integrated optical gyroscope".APPLIED OPTICS 60.3(2021):662-669. |
入库方式: OAI收割
来源:半导体研究所
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