Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint
文献类型：期刊论文
| 作者 | Su, Yue; Geng, Zhaoxin; Fang, Weihao; Lv, Xiaoqing; Wang, Shicai; Ma, Zhengtai; Pei, Weihua |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2021 |
| 卷号 | 12期号:2页码:121 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31390]  |
| 专题 | 半导体研究所_光电子研究发展中心 |
| 推荐引用方式 GB/T 7714 | Su, Yue; Geng, Zhaoxin; Fang, Weihao; Lv, Xiaoqing; Wang, Shicai; Ma, Zhengtai; Pei, Weihua. Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint[J]. MICROMACHINES,2021,12(2):121. |
| APA | Su, Yue; Geng, Zhaoxin; Fang, Weihao; Lv, Xiaoqing; Wang, Shicai; Ma, Zhengtai; Pei, Weihua.(2021).Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint.MICROMACHINES,12(2),121. |
| MLA | Su, Yue; Geng, Zhaoxin; Fang, Weihao; Lv, Xiaoqing; Wang, Shicai; Ma, Zhengtai; Pei, Weihua."Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint".MICROMACHINES 12.2(2021):121. |
入库方式： OAI收割
来源：半导体研究所
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