Piezoresistive Electronic-Skin Sensors Produced With Self-Channeling Laser Microstructured Silicon Molds
文献类型：期刊论文
| 作者 | Su, Yue; Zhang, Wei; Chen, Shanming; Yao, Danwen; Zhang, Xu; Chen, Hongda; Xu, Huailiang |
| 刊名 | IEEE TRANSACTIONS ON ELECTRON DEVICES
 |
| 出版日期 | 2021 |
| 卷号 | 68期号:2页码:786-792 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/31389]  |
| 专题 | 半导体研究所_光电子研究发展中心 |
| 推荐引用方式 GB/T 7714 | Su, Yue; Zhang, Wei; Chen, Shanming; Yao, Danwen; Zhang, Xu; Chen, Hongda; Xu, Huailiang. Piezoresistive Electronic-Skin Sensors Produced With Self-Channeling Laser Microstructured Silicon Molds[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES,2021,68(2):786-792. |
| APA | Su, Yue; Zhang, Wei; Chen, Shanming; Yao, Danwen; Zhang, Xu; Chen, Hongda; Xu, Huailiang.(2021).Piezoresistive Electronic-Skin Sensors Produced With Self-Channeling Laser Microstructured Silicon Molds.IEEE TRANSACTIONS ON ELECTRON DEVICES,68(2),786-792. |
| MLA | Su, Yue; Zhang, Wei; Chen, Shanming; Yao, Danwen; Zhang, Xu; Chen, Hongda; Xu, Huailiang."Piezoresistive Electronic-Skin Sensors Produced With Self-Channeling Laser Microstructured Silicon Molds".IEEE TRANSACTIONS ON ELECTRON DEVICES 68.2(2021):786-792. |
入库方式： OAI收割
来源：半导体研究所
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