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Numerical Analysis of Corona Pre-Ionization for High-Power Discharge-Pumped XeCl* Excimer Lasers

文献类型：期刊论文

作者Yang, Lizhao1,2,5; Fang, Xiaodong2,3,5; You, Libing3,4,5
刊名JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS
出版日期2022-03-01
卷号17
ISSN号1555-130X
关键词Excimer Laser High-Power Discharge-Pumped Preionisation Corona Discharge
DOI10.1166/jno.2022.3219
通讯作者You, Libing(youlibing@sztu.edu.cn)
英文摘要The working gas of discharge-pumped excimer lasers is generally a mixture of rare gases and monohalide. Typically, the working gas is preconized to generate reproducible uniform glow discharge. In high-power (more than 100 W) excimer lasers, this pre-ionization is achieved through spark discharge in the discharge chamber. In this study, a high-power discharge-pumped XeCl* excimer laser with corona preionisation was designed to investigate the feasibility of applying corona preionisation in high-power excimer lasers as well as analyse the correlation of corona discharges characteristics with laser discharge properties. The electron avalanche triggered by ultraviolet preionisation in the laser was numerically studied by creating 2D models. The simulation results revealed that the additional ionisation induced by the secondary electron emission of the cathode together with the dielectric constant of the corona bars significantly affect the discharge current of the principal electrodes. Under the condition of the design values, the peak preionisation electron density between electrodes was approximately 108 cm-3, and the laser discharge was quite uniform, which IP 8 46 247 10 On: Tue 27 Sep 2022 06 35:06 theoretically proved the feasibilityof usng corona preionsaon instead of spark discharge preionisation in Copyrigh : American Scientific Publishers high-power practical devices.
WOS关键词ARF ; KRF ; UV ; LITHOGRAPHY ; PERFORMANCE ; LIGHT
资助项目National Natural Science Foundation of China[1804a0802219] ; Anhui Province of China[KQTD20170331115422184] ; Science and Technology Plan of Shenzhen[ZKYXG-2018-04] ; Chinese Academy of Sciences[2020101] ; Natural Science Foundation of Top Talent of SZTU ; [41627803]
WOS研究方向Engineering ; Science & Technology - Other Topics ; Physics
语种英语
出版者AMER SCIENTIFIC PUBLISHERS
WOS记录号WOS:000867515200005
资助机构National Natural Science Foundation of China ; Anhui Province of China ; Science and Technology Plan of Shenzhen ; Chinese Academy of Sciences ; Natural Science Foundation of Top Talent of SZTU
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/129335]  
专题中国科学院合肥物质科学研究院
通讯作者You, Libing
作者单位1.Univ Sci & Technol China, Hefei 230026, Peoples R China
2.Adv Laser Technol Lab Anhui Prov, Hefei 230037, Peoples R China
3.Shenzhen Technol Univ, Coll New Mat & New Energies, Shenzhen 518118, Peoples R China
4.Shenzhen Shengfang Technol Corp, Shenzhen 518173, Peoples R China
5.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Hefei Inst Phys Sci, Anhui Prov Key Lab Photon Devices & Mat, Hefei 230031, Peoples R China
推荐引用方式
GB/T 7714		 Yang, Lizhao,Fang, Xiaodong,You, Libing. Numerical Analysis of Corona Pre-Ionization for High-Power Discharge-Pumped XeCl* Excimer Lasers[J]. JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS,2022,17.
APA Yang, Lizhao,Fang, Xiaodong,&You, Libing.(2022).Numerical Analysis of Corona Pre-Ionization for High-Power Discharge-Pumped XeCl* Excimer Lasers.JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS,17.
MLA Yang, Lizhao,et al."Numerical Analysis of Corona Pre-Ionization for High-Power Discharge-Pumped XeCl* Excimer Lasers".JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS 17(2022).

入库方式： OAI收割

来源：合肥物质科学研究院

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