Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate
文献类型：期刊论文
| 作者 | Cong Wang2,3; Cunxiu Zhang1,3; Dewen Niu1,3; Jian Kang1,3; Yan Lu1,3; Junying Hao1,2,3
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| 刊名 | Thin Solid Films
 |
| 出版日期 | 2022 |
| 期号 | 763页码:Thin Solid Films |
| 源URL | [http://ir.licp.cn/handle/362003/29818]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Yan Lu; Junying Hao |
| 作者单位 | 1.Qingdao Center of Resource Chemistry and New Materials, Qingdao 266000, China 2.b Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China 3.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou 730000, China |
| 推荐引用方式 GB/T 7714 | Cong Wang,Cunxiu Zhang,Dewen Niu,et al. Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate[J]. Thin Solid Films,2022(763):Thin Solid Films. |
| APA | Cong Wang,Cunxiu Zhang,Dewen Niu,Jian Kang,Yan Lu,&Junying Hao.(2022).Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate.Thin Solid Films(763),Thin Solid Films. |
| MLA | Cong Wang,et al."Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate".Thin Solid Films .763(2022):Thin Solid Films. |
入库方式： OAI收割
来源：兰州化学物理研究所
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