Application of positive pulse to extract ions from HiPIMS ionization region
文献类型：期刊论文
| 作者 | Li, Liuhe6; Gu, Jiabin5,6; Xu Y(许亿)3,4 ; Han, Mingyue6; Bilek, MarcelaMilenaMarie1,2; Xu Y(许亿)
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| 刊名 | VACUUM
 |
| 出版日期 | 2022-10-01 |
| 卷号 | 204页码:11 |
| 关键词 | High power impulse magnetron sputtering (HiPIMS) Ions extraction method PIC-MCC simulation Microscopic mechanism of ions extraction |
| ISSN号 | 0042-207X |
| DOI | 10.1016/j.vacuum.2022.111383 |
| 通讯作者 | Li, Liuhe(liliuhe@buaa.edu.cn) |
| 英文摘要 | High power impulse magnetron sputtering (HiPIMS) is a promising physical vapor deposition technique with one of the main drawbacks being its relatively low deposition rate. In this article, a method was propose by using a positive ions extraction pulse (Uextract) which would be immediately applied to the sputtering target after the HiPIMS negative pulse to extract out the ions from the ionization region near the HiPIMS target. The Particle-InCell/Monte Carlo Collision (PIC-MCC) simulation, experiments, and theoretical study were conducted to investigate the ions extraction process. It is demonstrated that the higher potential moved from the target area to the substrate direction and the peak ion density was driven to the substrate direction, after applying the positive ions extraction pulse to the target. The measured ion-energy distribution function (IEDF) characteristics verified that the ions extraction method works. The experimental results indicated that the Ti + ion flux dramatically increased when the Uextract was over 50 V. Good agreement between the experimental and simulation results was obtained, validating the simulation conclusion. Finally, the microscopic mechanism of ions extraction is proposed. |
| 分类号 | 二类 |
| WOS关键词 | DEPOSITION RATE ; MAGNETRON ; PLASMA ; ENERGY ; VOLTAGE ; PERIOD ; MODEL ; ARGON |
| 资助项目 | National Science and Technology Major Project ; National De-fense Fundamental Research Project ; [2017-VII-0012-0108] ; [JCKY2018601C205] |
| WOS研究方向 | Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000879537500004 |
| 资助机构 | National Science and Technology Major Project ; National De-fense Fundamental Research Project |
| 其他责任者 | Li, Liuhe |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/90753]  |
| 专题 | 宽域飞行工程科学与应用中心 |
| 作者单位 | 1.Univ Sydney, Sch Biomed Engn, Sydney, NSW 2006, Australia 2.Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia; 3.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China; 4.Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China; 5.Beijing Jiaotong Univ, Sch Mech Elect & Control Engn, Beijing 100044, Peoples R China; 6.Beihang Univ, Dept Mat Proc & Control Engn, Sch Mech Engn & Automat, Beijing 100191, Peoples R China; |
| 推荐引用方式 GB/T 7714 | Li, Liuhe,Gu, Jiabin,Xu Y,et al. Application of positive pulse to extract ions from HiPIMS ionization region[J]. VACUUM,2022,204:11. |
| APA | Li, Liuhe,Gu, Jiabin,许亿,Han, Mingyue,Bilek, MarcelaMilenaMarie,&Xu Y.(2022).Application of positive pulse to extract ions from HiPIMS ionization region.VACUUM,204,11. |
| MLA | Li, Liuhe,et al."Application of positive pulse to extract ions from HiPIMS ionization region".VACUUM 204(2022):11. |
入库方式： OAI收割
来源：力学研究所
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