Enhancing removal of hydrogen from granular polysilicon by innovating vacuum separation model and method for SoG-Si
文献类型：期刊论文
| 作者 | Wu, Zhiliang2,3; Qian, Guoyu1,2,4; Wang, Zhi1,2,4; Wang, Dong2,4; Ma, Wenhui3 |
| 刊名 | SOLAR ENERGY
 |
| 出版日期 | 2022-07-15 |
| 卷号 | 241页码:492-503 |
| 关键词 | Solar grade polysilicon Granular Polysilicon Dehydrogenation Vacuum refining Separation model |
| ISSN号 | 0038-092X |
| DOI | 10.1016/j.solener.2022.06.033 |
| 英文摘要 | Silane process of granular polysilicon has become a promising method for the preparation of polysilicon due to its continuous low temperature, simple process and low energy consumption. However, granular silicon contains more hydrogen than conventional columnar silicon, which can result in the deterioration of single crystal furnace thermal field life and rod stability by the "hydrogen jump" in the process of Czochralski method. Hydrogen removal has become an important problem to be solved in the industry development. Thus, we propose a hydrogen separation model suitable for silicon system based on vacuum experiment and thermodynamic calculation, which can provide a theoretical basis for the research and development of silicon dehydrogenation method. The predicted removal rate of hydrogen at different temperatures and vacuum pressures is in good agreement with the experimental results, reflecting the reasonability of the model. The results show that the hydrogen removal rate increases with the increasing of temperature and the decreasing of pressure, where temperature plays a leading role in the removal of hydrogen in silicon. At less than one atmosphere, the increase in dehydrogenation rate by 1 degrees C ranges from 0.01% to 0.25% in the temperature range from 1450 to 1800 degrees CAt temperatures below 1800 degrees Cthe maximum dehydrogenation rate is less than 0.001% for each 1pa reduction in pressure from one atmospheric pressure to 1000pa. According to the model calculation results, a hydrogen removal method is designed by using the vacuum electromagnetic induction. The deep removal of trace hydrogen in silicon has been realized, hydrogen in silicon drops rapidly from around 20 ppm to less than 5 ppm. |
| WOS关键词 | ALLOY ; BED |
| 资助项目 | National Natural Science Foundation of China[51934006] ; National Natural Science Foundation of China[U1902219] |
| WOS研究方向 | Energy & Fuels |
| 语种 | 英语 |
| WOS记录号 | WOS:000830024300003 |
| 出版者 | PERGAMON-ELSEVIER SCIENCE LTD |
| 资助机构 | National Natural Science Foundation of China |
| 源URL | [http://ir.ipe.ac.cn/handle/122111/54270]  |
| 专题 | 中国科学院过程工程研究所 |
| 通讯作者 | Qian, Guoyu; Wang, Zhi |
| 作者单位 | 1.1 North 2nd St, Beijing 100190, Peoples R China 2.Chinese Acad Sci, Inst Proc Engn, Natl Engn Res Ctr Green Recycling Strateg Met Reso, Beijing 100190, Peoples R China 3.Kunming Univ Sci & Technol, Fac Met & Energy Engn, Kunming 650093, Yunnan, Peoples R China 4.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wu, Zhiliang,Qian, Guoyu,Wang, Zhi,et al. Enhancing removal of hydrogen from granular polysilicon by innovating vacuum separation model and method for SoG-Si[J]. SOLAR ENERGY,2022,241:492-503. |
| APA | Wu, Zhiliang,Qian, Guoyu,Wang, Zhi,Wang, Dong,&Ma, Wenhui.(2022).Enhancing removal of hydrogen from granular polysilicon by innovating vacuum separation model and method for SoG-Si.SOLAR ENERGY,241,492-503. |
| MLA | Wu, Zhiliang,et al."Enhancing removal of hydrogen from granular polysilicon by innovating vacuum separation model and method for SoG-Si".SOLAR ENERGY 241(2022):492-503. |
入库方式： OAI收割
来源：过程工程研究所
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